Product description
6-inch low-knee shield, also described as an aluminum bowl shield.
Specifications and identifiers
identified features
| Component | Shield Shield item noun is consistent. |
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| Size/context | 6 in. Size wording appears repeatedly. |
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| Alternate wording | Low knee / bowl AL Both phrases appear as supported descriptive wording. |
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Applications
Chamber hardwareWafer-handling hardwareProcess shields and coversService replacement partsPVD/chamber shieldingProcess-area contamination shieldingShield replacement
How it works
A mechanical process-tool component used around chambers, wafer handling, shields, covers, brackets, or support assemblies.
Geometry, material, revision, coating, and wear condition can affect fit, sealing, contamination control, and process repeatability.
What to verify before purchase
- Confirm whether the physical part is the low-knee shield or bowl shield revision.
- Inspect coating, erosion, and dimensional fit.
- Verify material and chamber family.
Confirm with the seller
- Exact coating and material are not fully confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.