Product description
Low-knee shield for AL/Ti process context, described as SST 8-inch wafer hardware.
Specifications and identifiers
chamber details
| Component | Shield, low knee |
|---|
| Process context | AL/Ti |
|---|
| Size/context | 8 inch wafer hardware |
|---|
| Material | SST appears in descriptions Verify exact material. |
|---|
Applications
PVD process kitsetch process kitspreclean hardwarereplaceable chamber consumableslower/low-knee chamber shieldingAL/Ti process kit hardware8-inch chamber consumable replacement
How it works
A chamber shield or cover component used to protect tool surfaces and manage deposition or plasma exposure.
Shield geometry, material, coating, and cleaning/refurbishment history affect chamber fit and contamination control.
What to verify before purchase
- Confirm revision, cleaned/sealed condition, and exact chamber/process-kit position.
- Verify material and coating.
Confirm with the seller
- Exact platform and surface coating are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.