Product description
Upper shield, G12 double-knee, stainless steel, 300 mm context noted
Specifications and identifiers
Shield attributes
| Component | Upper shield Process-area shielding component. |
|---|
| Configuration | G12 double-knee Repeated configuration phrase in provided evidence. |
|---|
| Material | SST Stainless steel abbreviation appears in the evidence. |
|---|
| Wafer/tool size context | 300 mm noted in some evidence Verify exact size and tool configuration. |
|---|
Applications
chamber hardwareprocess kit componentswafer-area shieldingvacuum or gas-box hardwareprocess chamber shieldingcontamination and deposition control300 mm chamber hardware replacement
How it works
A upper chamber shield used as a physical part of a semiconductor processing chamber or module.
Dimensional fit, material, coating, and installed position can affect process uniformity, contamination control, and chamber sealing.
What to verify before purchase
- Confirm G12 double-knee geometry and stainless material.
- Verify tool/chamber compatibility and any coating or preclean requirement.
- Inspect wear, erosion, or refurbishment quality.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.