AMAT 0020-26310 LOWER SHIELD, CLAMPED, 6" INCH, TWAS, 183576AMAT 0020-26310 LOWER SHIELD, CLAMPED, 6" INCH, 146901AMAT 0020-26310 LOWER SHIELD, CLAMPED, 6" INCH, 146848AMAT 0020-26310 LOWER SHIELD, CLAMPED, 6" INCH, 146902AMAT 0020-26310 LOWER SHIELD, CLAMPED, 6" INCH, 146872AMAT 0020-26310 LOWER SHIELD, CLAMPED, 6" INCH, 146871AMAT 0020-26310 LOWER SHIELD, CLAMPED, 6" INCH, TWAS, 146851AMAT 0020-26310 LOWER SHIELD, CLAMPED, 6" INCH, TWAS, 146852AMAT 0020-26310 SHIELD LOWER 6" CLMPD SPPRT LESS DURA, Looks new, 106815Applied Materials (AMAT) 0020-26310 SHIELD LOWER 6" CLMPD SPPRT LESS DURA120-0601// AMAT APPLIED 0020-26310 SHIELD LOWER 6" CLMPD SPPRT L 2ND SOURCE NEW
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APPLIED MATERIALS 0020-26310

6 Inch Clamped Lower Shield

Market Availability & Pricing

Part number0020-26310
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales800 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Shields
6 Inch Clamped Lower Shield
APPLIED MATERIALS0020-26310Lower chamber shield
Product description
Lower shield, clamped, 6 inch, support-less / TWAS context
Specifications and identifiers
Shield attributes
Part roleLower shield
Chamber shield/liner component.
Size6 inch
Wafer/tool-size context supported by descriptions.
Configuration cluesClamped, support-less / TWAS references
Configuration should be matched to chamber hardware.
Applications
PVD/etch chamber shielding6 inch tool hardwareChamber PM kit componentsLower shield replacementChamber shield kit servicePlasma-exposed hardware refurbishment
How it works

A lower chamber shield protects chamber hardware and helps manage deposited film or plasma exposure.

Correct shield geometry and condition influence particle control, process repeatability, and chamber fit.

What to verify before purchase
  • Verify 6 inch chamber configuration, clamp interface, support-less/TWAS variant, and material/coating.
  • Inspect for erosion, flaking, warping, and coating buildup.
  • Confirm whether second-source parts are acceptable.
Confirm with the seller
  • Exact chamber platform and material are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

AMAT 0020-26310 LOWER SHIELD, CLAMPED, 6" INCH, TWAS, 183576

AMAT 0020-26310 LOWER SHIELD, CLAMPED, 6" INCH, TWAS, 183576

USD 1950.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jan 22, 2025 22:50 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 10, 2026 16:21 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-26310 LOWER SHIELD, CLAMPED, 6" INCH, 146901

AMAT 0020-26310 LOWER SHIELD, CLAMPED, 6" INCH, 146901

USD 1950.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Feb 14, 2024 19:00 UTC
End recorded: Dec 7, 2024 06:19 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:12 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-26310 LOWER SHIELD, CLAMPED, 6" INCH, 146848

AMAT 0020-26310 LOWER SHIELD, CLAMPED, 6" INCH, 146848

USD 1950.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Feb 14, 2024 19:00 UTC
End recorded: Dec 7, 2024 06:19 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:12 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-26310 LOWER SHIELD, CLAMPED, 6" INCH, 146902

AMAT 0020-26310 LOWER SHIELD, CLAMPED, 6" INCH, 146902

USD 1950.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Feb 14, 2024 19:00 UTC
End recorded: Dec 7, 2024 06:19 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:12 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-26310 LOWER SHIELD, CLAMPED, 6" INCH, 146872

AMAT 0020-26310 LOWER SHIELD, CLAMPED, 6" INCH, 146872

USD 1950.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Feb 14, 2024 18:00 UTC
End recorded: Dec 7, 2024 04:57 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:12 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-26310 LOWER SHIELD, CLAMPED, 6" INCH, 146871

AMAT 0020-26310 LOWER SHIELD, CLAMPED, 6" INCH, 146871

USD 1950.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Feb 14, 2024 18:00 UTC
End recorded: Dec 7, 2024 04:57 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:12 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-26310 LOWER SHIELD, CLAMPED, 6" INCH, TWAS, 146852

AMAT 0020-26310 LOWER SHIELD, CLAMPED, 6" INCH, TWAS, 146852

USD 1950.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Feb 14, 2024 01:00 UTC
End recorded: Dec 7, 2024 03:10 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:12 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-26310 LOWER SHIELD, CLAMPED, 6" INCH, TWAS, 146851

AMAT 0020-26310 LOWER SHIELD, CLAMPED, 6" INCH, TWAS, 146851

USD 1950.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Feb 14, 2024 01:00 UTC
End recorded: Dec 7, 2024 03:10 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:12 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-26310 SHIELD LOWER 6" CLMPD SPPRT LESS DURA, Looks new, 106815

AMAT 0020-26310 SHIELD LOWER 6" CLMPD SPPRT LESS DURA, Looks new, 106815

USD 850.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jun 15, 2022 20:00 UTC
End recorded: Dec 7, 2024 08:29 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:07 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay

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