Product description
Upper shield, 8 inch Durasource TTN
Specifications and identifiers
identification
| Component | Upper shield |
|---|
| Size | 8 inch |
|---|
| Process/source context | Durasource TTN |
|---|
Applications
Process chambersWafer processing hardwareVacuum chamber servicePreventive maintenance kitsEndura/Durasource chamber shield replacementPVD chamber maintenance
How it works
A mechanical process-tool component used for shielding, spacing, sealing, mounting, confinement, or chamber geometry control.
Material, coating, dimensions, process position, and surface condition can affect plasma behavior, contamination risk, and mechanical fit.
Technical guide
- CVD
- Chemical vapor deposition.
- ESC
- Electrostatic chuck.
- QTZ
- Quartz.
- SST
- Stainless steel.
What to verify before purchase
- Material/coating and surface condition
- 8 inch configuration
- Included in shield kit vs. standalone part
Confirm with the seller
- Specific tool serial-number compatibility
- Current calibration or functional test status
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.