Product description
8 inch clamp ring for TiN SNNF / ACAM SST context.
Specifications and identifiers
identified features
| Diameter/context | 8 inch |
|---|
| Process/context | TiN SNNF |
|---|
| Additional descriptor | 11402ARS ACAM SST |
|---|
Applications
etch chambersPVD chamberselectrostatic chuck hardwareChamber clamping and wafer-edge hardwarePVD/etch process kit support
How it works
A chamber ring, clamp ring, focus ring, or confinement ring is a precision part used around the wafer or electrode region.
These parts influence plasma boundary conditions, wafer-edge behavior, and chamber sealing or shielding.
What to verify before purchase
- Verify material/coating, revision, and chamber/process configuration.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.