Product description
Clamp ring, 8 inch, SNNF shut component; stainless steel material is suggested by evidence.
Specifications and identifiers
supported identity
| Function | Clamp ring A ring used to clamp or retain a process/shield component. |
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| Diameter class | 8 inch / 200 mm class Repeated evidence uses 8-inch wording. |
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| Material clue | SST / stainless steel Repeated evidence suggests stainless material; verify alloy and coating. |
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Equipment context
- Semiconductor process equipment
Applications
etch chambersCVD chambersPVD chamberswafer clampingprocess shieldingPVD/etch chamber clamp ring serviceprocess kit retaining hardware8-inch chamber hardware
How it works
A wafer-contact or process-facing ring, shield, window, pedestal, clamp, or plate used near the wafer/process area.
Diameter, material, coating, cleanliness, notch orientation, and revision directly affect process fit and contamination risk.
Technical guide
evidence_scope
Only material terms supported by provided evidence should be treated as likely.
typical
quartz, ceramic, alumina, stainless steel, Vespel, aluminum, or process-specific coated metals
CVD
chemical vapor deposition
PVD
physical vapor deposition
- 200mm
- 8-inch wafer-class tooling
- 300mm
- 12-inch wafer-class tooling
What to verify before purchase
- Verify SNNF/Shut Comp context, exact revision, and stainless material/alloy.
- Confirm cleaned/refurbished status if required.
Confirm with the seller
- Exact process chamber model.
- Surface finish and cleaning certification.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.