Product description
Pedestal, 8-inch 101 aluminum, pinless, floating, for 200mm chamber/pedestal use where the exact tool configuration is verified.
Specifications and identifiers
identity details
| Function | pedestal Supports or positions a wafer or chamber fixture in a process module. |
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| Size context | 8 inch / 200mm Repeated evidence describes an 8-inch/200mm context. |
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| Material/context | 101 AL / aluminum Evidence uses AL and 101 aluminum-style wording. |
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| Design terms | pinless, floating Specific mechanical design wording repeated in evidence. |
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Applications
CVD and PVD process chamberswafer support assembliespreclean and chamber lift mechanismswafer pedestal support200mm chamber hardware replacementpinless/floating wafer support context
How it works
A chamber pedestal or lift-related pedestal component supports or positions a wafer or process fixture inside a semiconductor process chamber.
Pedestal geometry, material, coating, lift interface, and wafer size can affect wafer support, thermal behavior, plasma exposure, and mechanical fit.
Technical guide
aluminum
Aluminum pedestals and rings are common in chamber hardware where machined stiffness and thermal behavior are important.
titanium
Titanium may be used where corrosion resistance, strength, or plasma/chamber compatibility is needed.
pinless/floating support
A pinless or floating pedestal description suggests the wafer or mating assembly is supported without conventional fixed lift pins in the described area.
- 200mm/8 inch
- Wafer or chamber-size context; verify actual fit before use.
- AL
- Common abbreviation for aluminum.
What to verify before purchase
- Verify 8-inch/200mm configuration, AL material/spec, and whether the pedestal is pinless/floating as required.
- Check surface condition, flatness, and process-facing contamination.
Confirm with the seller
- Exact tool configuration compatibility is not confirmed beyond the evidence provided.
- Current functional condition is not established by part identity alone.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.