Product description
Clamp ring, 6 inch SMF, stainless steel, 1.88EE, 10405ARP.
Specifications and identifiers
dimensions and material
| Nominal size | 6 inch Wafer/process size or ring class indicated by evidence. |
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| Material | SST / stainless steel Stainless construction is indicated. |
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| Additional descriptor | SMF, 1.88EE, 10405ARP Configuration or drawing/style descriptors to verify against the tool BOM. |
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Applications
PVD or etch chamber hardwarewafer-edge or shield retentionprocess kit maintenanceChamber process kit replacementClamp or shield retention6-inch process hardware service
How it works
A ring-shaped mechanical component used to clamp, shield, or retain parts in a process chamber region.
Correct ring geometry and material are important for chamber fit, process uniformity, and contamination control.
Technical guide
stainless_steel
Corrosion-resistant metal commonly used for mechanical chamber hardware where appropriate.
- AMAT
- Common abbreviation for Applied Materials.
- ASSY
- Assembly.
- ID
- Inside diameter.
- OD
- Outside diameter.
- PCB
- Printed circuit board.
- PWB
- Printed wiring board; often used interchangeably with PCB.
- REV
- Revision level; confirm against the required tool configuration.
- SST
- Stainless steel.
What to verify before purchase
- Confirm SMF/1.88EE/10405ARP configuration and revision.
- Inspect surface finish, cleaning status, and dimensional condition.
Confirm with the seller
- Specific chamber platform is not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.