Product description
Outer cup / rigid coil support made of SST, Vectra/VECT context.
Specifications and identifiers
identification
| Function | Outer cup / rigid coil support Mechanical support around a coil or chamber component. |
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| Material | SST Stainless steel. |
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| Context | VECT/Vectra Tool or chamber family descriptor to verify. |
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Applications
PVD chambersCVD chambersetch process kitsscheduled chamber maintenancecoil support hardwarechamber support cup replacement
How it works
A process-kit or shield component protects chamber hardware, shapes plasma or gas flow, or supports deposition/etch process geometry.
Material, coating, cleanliness, and exact geometry directly affect contamination control and process repeatability.
Technical guide
- AMAT
- Applied Materials abbreviation.
- ASSY
- Assembly.
- P/N
- Part number.
- PCB
- Printed circuit board.
- SST
- Stainless steel.
What to verify before purchase
- Verify exact revision and configuration against the installed tool.
- Inspect condition, cleanliness, connectors, seals, and any included subassemblies.
Confirm with the seller
- Exact tool compatibility beyond the stated part identity is not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.