Product description
Coil / coil ring, 1/8 inch thick, center holes-knurled, VEC reference, for Applied Materials equipment.
Specifications and identifiers
identified attributes
| Function | Coil / coil ring Chamber or process hardware ring/coil component. |
|---|
| Thickness | 1/8 inch Supported by provided description. |
|---|
| Feature | Center holes, knurled Verify physical geometry. |
|---|
| Reference | VEC Likely tool/chamber context; verify. |
|---|
Equipment context
- Applied Materials VEC-related assembly
Applications
process chamberswafer support assembliesplasma-facing hardwaremechanical transfer hardwarechamber ring replacementprocess hardware service
How it works
A chamber, handling, or mechanical component used for positioning, shielding, isolation, or process-area hardware support.
Geometry, material, wafer size, coating/cleanliness state, and process compatibility are critical for chamber parts.
Technical guide
chamber_coil_ring
Coil/ring components can serve as process-area hardware, shielding, or electromagnetic/mechanical chamber elements depending on the tool design.
- THK
- Thickness.
- VEC
- Abbreviation/context not fully expanded from the evidence; verify on tool documentation.
What to verify before purchase
- Material and coating
- Thickness and hole pattern
- Revision and cleanliness condition
- Meaning of VEC context
Confirm with the seller
- Exact material
- Exact chamber compatibility
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.