Product description
Vector Shield, Applied Materials 0020-29344
Specifications and identifiers
provided listing evidence
| Component type | Vector shield Repeated listing titles identify the part as a shield. |
|---|
| Platform/context | Vector Vector context appears in the item phrase; exact tool/model compatibility should be verified. |
|---|
Applications
process chamberswafer edge controlplasma shieldinggas distributionCVD/PVD/etch hardwareChamber shielding/protectionVector platform chamber component replacement
How it works
A chamber-facing mechanical component used near the wafer, plasma, gas flow, or process zone.
Geometry, material, wafer size, process family, and wear condition affect fit, contamination risk, and process performance.
Technical guide
edge ring
A ring around the wafer edge used to influence plasma/process uniformity and protect adjacent chamber hardware.
faceplate
A gas distribution or chamber plate, depending on tool design and listing context.
shield
A replaceable chamber liner or protective component used to reduce deposition on tool structures.
- 200mm
- Wafer size class also commonly called 8 inch.
- 300mm
- Wafer size class for larger modern process tools.
- SST
- Stainless steel when supported by listing text.
What to verify before purchase
- Exact revision and part-number suffix on the physical label
- Connector, flange, mounting, or interface compatibility with the target tool
- Actual condition, completeness, included accessories, and calibration/leak-test status where applicable
Confirm with the seller
- Exact OEM datasheet specifications
- Guaranteed machine compatibility beyond listed evidence
- Condition or calibration status unless supplied by the seller
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.