0020-30059 / PUMPING PLATE 13 HOLE / APPLIED MATERIALS AMATApplied Materials 0020-30059 Pumping Plate 13 HoleAMAT 0020-30059 PUMPING PLATE CONFORMAL 200MM, 13423222401 APPLIED MATERIALS PUMPING PLATE CONFORMAL SILANE NITRIDE 2 0020-3005921123 APPLIED MATERIALS PUMPING PLT CONFORMAL 200MM (NEW) 0020-30059Applied Materials (AMAT) 0020-30059 Pumping plate, common silaneApplied Materials 0020-30059 Pumping Plate 13 Hole22401 APPLIED MATERIALS PUMPING PLATE CONFORMAL SILANE NITRIDE 2 0020-30059AMAT, PUMPING PLATE 13 HOLES, AMP, p/n 0020-30059AMAT 0020-30059 Pumping Plate, Common Silane 200MM
Image 1 of 10

APPLIED MATERIALS 0020-30059

200 mm Pumping Plate

Market Availability & Pricing

Part number0020-30059
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales650 (currency not captured) — public listing price; reported sold quantity is not a verified transaction. Recorded acceptance: Accepted price not disclosed
Mechanical › Chamber Components › Pumping Plates
200 mm Pumping Plate
APPLIED MATERIALS0020-30059Pumping plate
Product description
Pumping plate for common/conformal silane context, 13-hole / 200 mm descriptors.
Specifications and identifiers
details
Wafer size200 mm
Hole pattern13-hole wording appears
Process descriptorCommon/conformal silane context
identification
Normalized item typePumping plate
Supported descriptionPumping plate for common/conformal silane context, 13-hole / 200 mm descriptors.
Applications
PVD/CVD/etch process chamberselectrostatic chuck assembliesdeposition shields, liners, rings, and coversGas/exhaust conductance management in process chamberReplacement pumping plate in 200 mm chamber hardware
How it works

A chamber or wafer-processing hardware component used around the wafer, chamber wall, source area, or electrostatic chuck stack.

Geometry, material, coating, and wafer size strongly affect process fit, plasma exposure, and contamination control.

Technical guide
ceramic_or_metal

Many chamber parts use ceramics, aluminum, stainless steel, quartz, or coated metals depending on plasma and chemistry exposure.

ESC

Electrostatic chuck hardware clamps or supports wafers during processing.

What to verify before purchase
  • Confirm 13-hole pattern and conformal/common silane variant.
  • Verify surface finish and any coating/cleaning requirements.
Confirm with the seller
  • Exact machine compatibility beyond the named platform/context is not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

0020-30059 / PUMPING PLATE 13 HOLE / APPLIED MATERIALS AMAT

0020-30059 / PUMPING PLATE 13 HOLE / APPLIED MATERIALS AMAT

USD 750.7700

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 30, 2025 23:31 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 14, 2026 16:10 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Applied Materials 0020-30059 Pumping Plate 13 Hole

Applied Materials 0020-30059 Pumping Plate 13 Hole

USD 650.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Feb 17, 2024 00:00 UTC
End recorded: Dec 7, 2024 11:40 UTC
Estimated remaining at check: 7
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:14 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-30059 PUMPING PLATE CONFORMAL 200MM, 134232

AMAT 0020-30059 PUMPING PLATE CONFORMAL 200MM, 134232

USD 1695.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Nov 2, 2023 19:30 UTC
End recorded: Dec 7, 2024 05:22 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 3, 2026 16:19 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
22401 APPLIED MATERIALS PUMPING PLATE CONFORMAL SILANE NITRIDE 2 0020-30059

22401 APPLIED MATERIALS PUMPING PLATE CONFORMAL SILANE NITRIDE 2 0020-30059

USD 659.5100

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Sep 28, 2022 07:30 UTC
End recorded: Dec 7, 2024 07:05 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:19 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
21123 APPLIED MATERIALS PUMPING PLT CONFORMAL 200MM (NEW) 0020-30059

21123 APPLIED MATERIALS PUMPING PLT CONFORMAL 200MM (NEW) 0020-30059

USD 1804.43

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: NEW
Listed: Oct 1, 2020 04:22 UTC
End recorded: Dec 7, 2024 14:22 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 21, 2026 11:22 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

Direct marketplace listings

0 matching listings.

No active-status direct listings are shown on this page.

Marketplace search uses listing titles and service keywords, with quoted phrases and -excluded terms.