AMAT 0020-30072 VESPEL RIM, 200MM OX/MLR, 152738AMAT 0020-30072 VESPEL RIM, 200MM OX/MLR, 152739AMAT 0020-30072 VESPEL RIM, 200MM OX/MLR, 152740AMAT 0020-30072 VESPEL RIM, 200MM OX/MLR, 148541AMAT 0020-30072 VESPEL RIM, 200MM OX/MLR, 148542AMAT 0020-30072 VESPEL RIM, 200MM OX/MLR, 148441AMAT 0020-30072 VESPEL RIM, 200MM OX/MLR, 148440AMAT 0020-30072 VESPEL RIM, 200MM OX/MLR, 148424AMAT 0020-30072 VESPEL RIM, 200MM OX/MLR, 148423AMAT 0020-30072 VESPEL RIM, 200MM OX/MLR, 148333AMAT 0020-30072 Vespel Rim, 200mm OX/MLR, 145347AMAT 0020-30072 VESPEL RIM, 200MM, OX/MLR, 144209AMAT 0020-30072 VESPEL RIM, 200MM, OX/MLR, 144210AMAT 0020-30072 VESPEL RIM, 200MM, OX/MLR, 102956Applied Materials (AMAT) 0020-30072 VESPEL RIM,200MM OX/MLR
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APPLIED MATERIALS 0020-30072

200 mm Vespel Rim

Market Availability & Pricing

Part number0020-30072
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Mechanical › Chamber Components › Polymer Rings
200 mm Vespel Rim
APPLIED MATERIALS0020-30072Vespel rim
Product description
Vespel rim, 200 mm OX/MLR.
Specifications and identifiers
supported identity
MaterialVespel
Repeated evidence supports Vespel material.
FunctionRim
Evidence identifies this as a rim component.
Size/process clue200 mm OX/MLR
Repeated evidence includes this descriptor.
Equipment context
  • Semiconductor process equipment
Applications
etch chambersCVD chambersPVD chamberswafer clampingprocess shielding200 mm process kit componentoxide/MLR chamber rim replacementhigh-temperature polymer process hardware
How it works

A wafer-contact or process-facing ring, shield, window, pedestal, clamp, or plate used near the wafer/process area.

Diameter, material, coating, cleanliness, notch orientation, and revision directly affect process fit and contamination risk.

Technical guide
evidence_scope

Only material terms supported by provided evidence should be treated as likely.

typical

quartz, ceramic, alumina, stainless steel, Vespel, aluminum, or process-specific coated metals

CVD

chemical vapor deposition

ESC

electrostatic chuck

PVD

physical vapor deposition

200mm
8-inch wafer-class tooling
300mm
12-inch wafer-class tooling
What to verify before purchase
  • Verify exact Vespel grade, chamber family, and revision.
  • Confirm cleanliness and wear condition.
Confirm with the seller
  • Exact polymer grade and process exposure history.
  • Dimensional drawing.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

AMAT 0020-30072 VESPEL RIM, 200MM OX/MLR, 152738

AMAT 0020-30072 VESPEL RIM, 200MM OX/MLR, 152738

USD 850.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Apr 4, 2024 22:00 UTC
End recorded: Dec 7, 2024 05:56 UTC
Estimated remaining at check: 4
Estimated sold at check: 0

eBay response captured — Checked Oct 6, 2026 16:04 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-30072 VESPEL RIM, 200MM OX/MLR, 152740

AMAT 0020-30072 VESPEL RIM, 200MM OX/MLR, 152740

USD 850.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Apr 4, 2024 22:00 UTC
End recorded: Dec 7, 2024 05:56 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 6, 2026 16:04 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-30072 VESPEL RIM, 200MM OX/MLR, 152739

AMAT 0020-30072 VESPEL RIM, 200MM OX/MLR, 152739

USD 850.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Apr 4, 2024 22:00 UTC
End recorded: Dec 7, 2024 05:56 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 6, 2026 16:04 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-30072 VESPEL RIM, 200MM OX/MLR, 148541

AMAT 0020-30072 VESPEL RIM, 200MM OX/MLR, 148541

USD 850.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Feb 28, 2024 00:00 UTC
End recorded: Dec 6, 2024 17:12 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:16 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-30072 VESPEL RIM, 200MM OX/MLR, 148542

AMAT 0020-30072 VESPEL RIM, 200MM OX/MLR, 148542

USD 850.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Feb 28, 2024 00:00 UTC
End recorded: Dec 6, 2024 17:12 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:16 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-30072 VESPEL RIM, 200MM OX/MLR, 148441

AMAT 0020-30072 VESPEL RIM, 200MM OX/MLR, 148441

USD 850.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Feb 27, 2024 19:00 UTC
End recorded: Dec 7, 2024 09:43 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:16 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-30072 VESPEL RIM, 200MM OX/MLR, 148440

AMAT 0020-30072 VESPEL RIM, 200MM OX/MLR, 148440

USD 850.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Feb 27, 2024 19:00 UTC
End recorded: Dec 7, 2024 09:43 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:16 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-30072 VESPEL RIM, 200MM OX/MLR, 148424

AMAT 0020-30072 VESPEL RIM, 200MM OX/MLR, 148424

USD 850.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Feb 27, 2024 18:30 UTC
End recorded: Dec 7, 2024 09:00 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:16 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-30072 VESPEL RIM, 200MM OX/MLR, 148423

AMAT 0020-30072 VESPEL RIM, 200MM OX/MLR, 148423

USD 850.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Feb 27, 2024 18:30 UTC
End recorded: Dec 7, 2024 09:00 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:16 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-30072 VESPEL RIM, 200MM OX/MLR, 148333

AMAT 0020-30072 VESPEL RIM, 200MM OX/MLR, 148333

USD 850.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Feb 26, 2024 23:30 UTC
End recorded: Dec 7, 2024 04:50 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:16 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-30072 Vespel Rim, 200mm OX/MLR, 145347

AMAT 0020-30072 Vespel Rim, 200mm OX/MLR, 145347

USD 850.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Jan 31, 2024 22:00 UTC
End recorded: Dec 7, 2024 05:33 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:07 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-30072 VESPEL RIM, 200MM, OX/MLR, 144210

AMAT 0020-30072 VESPEL RIM, 200MM, OX/MLR, 144210

USD 850.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Jan 19, 2024 20:30 UTC
End recorded: Dec 7, 2024 00:54 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:03 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-30072 VESPEL RIM, 200MM, OX/MLR, 144209

AMAT 0020-30072 VESPEL RIM, 200MM, OX/MLR, 144209

USD 850.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Jan 19, 2024 20:30 UTC
End recorded: Dec 7, 2024 00:54 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:03 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-30072 VESPEL RIM, 200MM, OX/MLR, 102956

AMAT 0020-30072 VESPEL RIM, 200MM, OX/MLR, 102956

USD 850.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Dec 29, 2021 20:32 UTC
End recorded: Dec 7, 2024 08:54 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 29, 2026 16:20 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay

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