Product description
Vespel rim, 200 mm OX/MLR.
Specifications and identifiers
supported identity
| Material | Vespel Repeated evidence supports Vespel material. |
|---|
| Function | Rim Evidence identifies this as a rim component. |
|---|
| Size/process clue | 200 mm OX/MLR Repeated evidence includes this descriptor. |
|---|
Equipment context
- Semiconductor process equipment
Applications
etch chambersCVD chambersPVD chamberswafer clampingprocess shielding200 mm process kit componentoxide/MLR chamber rim replacementhigh-temperature polymer process hardware
How it works
A wafer-contact or process-facing ring, shield, window, pedestal, clamp, or plate used near the wafer/process area.
Diameter, material, coating, cleanliness, notch orientation, and revision directly affect process fit and contamination risk.
Technical guide
evidence_scope
Only material terms supported by provided evidence should be treated as likely.
typical
quartz, ceramic, alumina, stainless steel, Vespel, aluminum, or process-specific coated metals
CVD
chemical vapor deposition
PVD
physical vapor deposition
- 200mm
- 8-inch wafer-class tooling
- 300mm
- 12-inch wafer-class tooling
What to verify before purchase
- Verify exact Vespel grade, chamber family, and revision.
- Confirm cleanliness and wear condition.
Confirm with the seller
- Exact polymer grade and process exposure history.
- Dimensional drawing.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.