Product description
Pumping plate for 4/5/6 in nitride giant-gap chamber context; EESI 2900-11777 is referenced.
Specifications and identifiers
identification
| Component type | Pumping plate Plate used to manage exhaust/pumping conductance or chamber flow. |
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| Process context | Nitride giant gap Chamber/process context from evidence. |
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| Size reference | 4/5/6 in Size context appears in descriptions. |
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| Associated reference | EESI 2900-11777 Related reference number appears. |
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Applications
CVD/process chamber pumping pathGas-flow managementChamber service hardwareExhaust flow shapingChamber pumping conductance controlNitride chamber service
How it works
A pumping plate used as a replaceable semiconductor-equipment or industrial-tool component.
Correct identification matters because fit, connector style, calibration, cleanliness, and revision can determine whether the part will install and operate correctly.
Technical guide
pumping_plate
Controls gas evacuation pattern and conductance in a process chamber.
- giant_gap
- Chamber geometry/process configuration term; exact tool configuration should be verified.
What to verify before purchase
- Exact chamber/tool model
- Hole pattern and dimensions
- Material/coating
- Associated EESI reference
Confirm with the seller
- Exact tool configuration beyond supported references
- Current operational condition
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.