Product description
Perforated 150 mm nitride plate, also described as a showerhead-style plate for P5000/nitride giant-gap use.
Specifications and identifiers
chamber
| Item form | Perforated plate A plate with holes/openings used to distribute gas or manage flow in a chamber. |
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| Wafer/process size reference | 150 mm Size reference found in the item description. |
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| Process reference | Nitride / giant gap Process or chamber style terms associated with the plate. |
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Applications
process chamber maintenancePVD/CVD/etch chamber hardwarewafer-handling or chamber interface assembliesGas distribution or showerhead-style chamber plateNitride process chamber hardware
How it works
A chamber mechanical component is a physical part used in or around a process chamber, wafer handling area, or vacuum hardware.
Dimensional fit, material compatibility, surface condition, and revision can affect process performance, vacuum integrity, and particle control.
What to verify before purchase
- Hole pattern and diameter
- Flatness and surface condition
- Whether the application is P5000 giant-gap nitride
Confirm with the seller
- Exact chamber configuration
- Material grade
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.