Product description
Applied Materials 0020-30223 6 inch / 152 mm gas distribution plate or showerhead plate, also described as a gas distributor plate with 133 holes.
Specifications and identifiers
identification
| Description | Gas distribution plate / showerhead |
|---|
| Nominal size | 6 inch / 152 mm |
|---|
| Reported feature | 133 holes appears in evidence |
|---|
| Related supplier marking | Shibuya International 9029816 appears in evidence; verify label |
|---|
Applications
PVD/CVD chamber consumable stacksESC/focus/shadow/deposition ring setsthrottle valve and gas distribution hardwareProcess gas distributionShowerhead plate service150 mm / 6 inch chamber hardware replacement
How it works
A process-facing ring or plate used around the wafer, chuck, throttle opening, or gas-distribution area inside a semiconductor process chamber.
Geometry, material, coating, cleanliness, and revision affect fit, plasma behavior, gas flow, contamination risk, and process repeatability.
Technical guide
aluminum
Common in chamber hardware; verify coating and cleaned/refurbished status.
ceramic
Often used for plasma-facing insulation and wear resistance when supported by part markings.
quartz
High-purity silica glass used in many plasma or thermal chamber locations.
- ESC
- electrostatic chuck
- SNNF
- process/context abbreviation seen in chamber part descriptions; verify against tool documentation
What to verify before purchase
- Verify hole count, pattern, material, and cleaned condition
- Confirm whether this is used as a showerhead plate or clamp-ring-associated gas distributor
- Check surface wear, deposits, and flatness
Confirm with the seller
- Exact tool/chamber compatibility is not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.