0020-30287 / ADAPTER RING PUMPING PLATE 200MM COMMO / APPLIED MATERIALS AMATAMAT 0020-30287 Adapter Ring Pumping, 147995AMAT 0020-30287 Adapter Ring, Pumping Plate, 200mm, 136768AMAT 0020-30287 ADAPTER RING 200MM LTD CERAMICS, 135187AMAT 0020-30287 ADAPTER RING 200MM LTD CERAMICS, 1181340020-30287 / ADAPTER RING PUMPING PLATE 200MM COMMO / APPLIED MATERIALS AMAT0020-30287 / ADAPTER RING PUMPING PLATE 200MM COMMO / APPLIED MATERIALS AMATApplied Materials Adapter Pump Plate AMAT 0020-30287Applied Materials Adapter Pump Plate AMAT 0020-30287Applied Materials Adapter Pump Plate AMAT 0020-30287Applied Materials Adapter Pump Plate AMAT 0020-30287Applied Materials Adapter Pump Plate AMAT 0020-302870020-30287, AMAT, ADAPTER RING PUMPING PLATE, 200MM0020-30287 / ADAPTER RING, PUMPING PLATE, 200MM COMMO / APPLIED MATERIALS AMATApplied Materials (AMAT) 0020-30287 Adapter ring, Pumping plateApplied Materials (AMAT) 0020-30287 Adapter ring, Pumping plateApplied Materials (AMAT) 0020-30287 Adapter ring, Pumping plateAPPLIED MATERIALS ADAPTER PUMPING RING 0020-30287AMAT 0020-30287 ADAPTER RING, PUMPING PLATE, 200 MM COMAMAT 0020-30287 ADAPTER RING, PUMPING PLATE, 200 MM COM, 399792AMAT 0020-30287 Adapter Ring, Pumping Plate, 200MM Common SilaneAPPLIED MATERIALS ADAPTER PUMPING RING 0020-30287APPLIED MATERIALS ADAPTER PUMPING RING 0020-30287APPLIED MATERIALS ADAPTER PUMPING RING 0020-30287
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APPLIED MATERIALS 0020-30287

Adapter Ring / Pumping Plate, 200 mm

Market Availability & Pricing

Part number0020-30287
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales1255.31 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Adapter Rings
Adapter Ring / Pumping Plate, 200 mm
APPLIED MATERIALS0020-30287Adapter ring / pumping plate
Product description
Adapter ring / pumping plate for 200 mm common/silane-related chamber hardware.
Specifications and identifiers
functional details
Wafer size context200 mm
Repeatedly referenced with 200 mm.
FunctionAdapter ring / pumping plate
Used as chamber mechanical hardware around pumping or gas-flow geometry.
Equipment context
  • Specific tool/platform not confirmed
Applications
process chambersPVD/CVD/etch moduleswafer-area mechanical hardwareSemiconductor equipment maintenanceChamber or subsystem rebuildSpare part replacement
How it works

A chamber mechanical component used as a shield, cover, adapter, baffle, ring, or plate within a semiconductor process module.

These parts protect internal surfaces, define gas/plasma geometry, support wafer-area hardware, or maintain chamber configuration.

What to verify before purchase
  • Exact revision and part markings
  • Physical condition, cleanliness, and prior process exposure
  • Fitment against the target tool BOM or chamber configuration
  • Wafer size, coating/material, and chamber position
Confirm with the seller
  • Full OEM specification
  • Guaranteed compatibility with a specific chamber without BOM confirmation

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

0020-30287 / ADAPTER RING PUMPING PLATE 200MM COMMO / APPLIED MATERIALS AMAT

0020-30287 / ADAPTER RING PUMPING PLATE 200MM COMMO / APPLIED MATERIALS AMAT

USD 1129.7800

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Oct 13, 2026 05:04 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 13, 2026 16:00 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-30287 Adapter Ring Pumping, 147995

AMAT 0020-30287 Adapter Ring Pumping, 147995

USD 1500.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Feb 23, 2024 20:00 UTC
End recorded: Dec 7, 2024 12:02 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:16 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-30287 Adapter Ring, Pumping Plate, 200mm, 136768

AMAT 0020-30287 Adapter Ring, Pumping Plate, 200mm, 136768

USD 1500.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Nov 21, 2023 01:30 UTC
End recorded: Dec 7, 2024 13:41 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 3, 2026 16:24 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-30287 ADAPTER RING 200MM LTD CERAMICS, 135187

AMAT 0020-30287 ADAPTER RING 200MM LTD CERAMICS, 135187

USD 900.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Nov 18, 2023 04:05 UTC
End recorded: Dec 6, 2024 19:52 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 3, 2026 16:21 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-30287 ADAPTER RING 200MM LTD CERAMICS, 118134

AMAT 0020-30287 ADAPTER RING 200MM LTD CERAMICS, 118134

USD 1500.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: May 25, 2023 17:00 UTC
End recorded: Dec 6, 2024 17:21 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:04 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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