| Component | Pedestal / chuck Wafer support component. |
|---|---|
| Wafer size | 150 mm / 6 inch Size reference consistently associated with this part. |
| Configuration | Flat; aluminum/poly/WSi Evidence wording for geometry and material/process context. |
| Revision references | Rev.001; Rev.C Revision variants appear in the evidence and should be checked. |
A chamber pedestal or chuck component that supports or interfaces with a wafer during processing.
Pedestal/chuck geometry, material stack, wafer size, flatness, revision, and process compatibility affect wafer support, thermal behavior, and chamber fit.
The evidence indicates aluminum/poly/WSi wording; exact materials, coatings, and exposed surfaces should be confirmed from drawings or inspection.
Pedestals and chucks support wafers and may interact with thermal, vacuum, RF, or mechanical clamping systems.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.
No public documents were listed for this part when captured.
Prices and availability may change. Confirm details with the seller.
Observed public listing price, not an accepted sale amount.
eBay response captured — Checked Oct 9, 2026 16:10 UTC
Availability has not been rechecked; current availability is unknown.
Best Offer · Buy It Now
View on eBay0 matching listings.
No active-status direct listings are shown on this page.
Auction listing history. Direct marketplace listings are shown separately.
| Currency | Price basis | Records | Minimum | Maximum | Mean |
|---|---|---|---|---|---|
| USD | Observed public listing prices | 1 | 375.0000 | 375.0000 | 375.0000000000000000 |
Amounts without an established currency are retained in the history below and excluded from monetary comparisons. Bids, public listing prices and accepted amounts are distinct; no currency conversion is applied.
| Time recorded | Listing | Observation | Public price | Recorded acceptance |
|---|---|---|---|---|
| Apr 26, 2024 07:25 UTC | 134-0504// AMAT APPLIED 0020-30314 PEDESTAL ALUM/POLY/WSI 150MM FLAT ASIS | Completed listing price | 500 (currency not captured) | Not established |
| Apr 9, 2023 22:21 UTC | 0020-30314 PEDESTAL ALUM/POLY/WSI 150MM FLAT, lot of 2 | Completed listing price | 1400 (currency not captured) | Not established |
| Feb 14, 2022 18:32 UTC | 0020-30314 PEDESTAL ALUM/POLY/WSI 150MM FLAT | Completed listing price | 650 (currency not captured) | Not established |
| Nov 14, 2018 09:26 UTC | Applied Materials (AMAT) 0020-30314 PEDESTRAL, ALUM | Completed listing price | 395 (currency not captured) | Not established |
| Mar 20, 2018 14:11 UTC | AMAT 0020-30314 6" PEDESTRAL ALUM POLY WSI 150MM FLAT - NEW | Completed listing price | 1005.35 (currency not captured) | Not established |
| Mar 15, 2017 15:20 UTC | Applied Materials 0020-30314 6 Pedestal, Alum/Poly/WSI 150 MM Flat AMAT Etch | Completed listing price | 455 (currency not captured) | Not established |
| Aug 19, 2016 03:10 UTC | Amat Part Pedestal Alum/poly 150mm Flat WSI No. 0020-30314 | Completed listing price | 75 (currency not captured) | Not established |
| Jul 23, 2016 12:19 UTC | AMAT 0020-30314 Pedestal Chuck Alum/Poly 150mm Flat Rev.001 ASL | Completed listing price | 250 (currency not captured) | Not established |
| Feb 4, 2016 04:02 UTC | New! Amat Applied 0020-30314 Rev.001 P-5000 Pedestal Alum/poly Chuck 150mm Flat | Completed listing price | 650 (currency not captured) | Not established |
| Jan 13, 2016 03:02 UTC | New! Amat Applied 0020-30314 Rev.001 P-5000 Pedestal Alum/poly Chuck 150mm Flat | Completed listing price | 650 (currency not captured) | Not established |
| May 1, 2015 11:47 UTC | New Amat Pedestal Chuck 0020-30314 Rev.001 ASL 150mm, Flat | Completed listing price | 150 (currency not captured) | Not established |
| Apr 2, 2015 08:38 UTC | New Amat Pedestal Chuck 0020-30314 Rev.001 ASL 150mm, Flat | Completed listing price | 500 (currency not captured) | Not established |
Public listing prices, direct recorded sale prices and recorded accepted Best Offer amounts remain distinct. Quantities are source estimates. No aggregate sales total or average is inferred.
Prices and availability may change. Confirm details with the seller.
Legacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBay0 of 0 matching services.
No services match this search.
Marketplace search uses listing titles and service keywords, with quoted phrases and -excluded terms.