Product description
Housing, quartz tube, SACVD
Specifications and identifiers
identification
| Item type | Housing Mechanical housing component. |
|---|
| Material/context | Quartz tube QTZ/quartz tube wording appears consistently. |
|---|
| Process/tool note | SACVD Sub-atmospheric CVD context explicitly named. |
|---|
Equipment context
- Applied Materials SACVD equipment
Applications
CVD chambersetch chambersplasma-facing hardwaregas distribution areasquartz chamber hardwareSACVD process module repairtube support or protective housing
How it works
A quartz tube housing used inside or near a semiconductor process chamber.
Ceramic geometry, material grade, surface finish, and process compatibility affect plasma behavior, particle generation, and fit.
Technical guide
ceramic
Exact ceramic composition should be verified; similar-looking parts can use different materials.
quartz
Quartz is used where high purity, thermal stability, and chemical resistance are needed.
yttria
Yttria-based ceramics are used in some plasma environments because of their resistance to aggressive plasma chemistries.
CVD
Chemical vapor deposition equipment deposits thin films on wafers.
HDPCVD
High-density plasma CVD uses plasma to assist film deposition, often with specialized chamber ceramics.
- DPS
- Decoupled Plasma Source, an Applied Materials platform/family term in many part descriptions.
- HDPCVD
- High-density plasma chemical vapor deposition.
- SACVD
- Sub-atmospheric chemical vapor deposition.
What to verify before purchase
- Verify quartz condition, chips, cracks, and contamination.
- Confirm exact SACVD chamber configuration.
- Check dimensional fit against OEM drawing.
Confirm with the seller
- Exact quartz grade
- dimensions
- complete tool compatibility
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.