Product description
Seal, throttle valve, SACVD
Specifications and identifiers
identification
| Function | Seal for throttle valve |
|---|
| Process context | SACVD referenced |
|---|
seal context
| Service role | Seals support vacuum integrity around throttle-valve hardware. |
|---|
Applications
Gas panelsVacuum linesPneumatic circuitsCryogenic or helium serviceThrottle valve maintenanceVacuum seal replacement in SACVD hardware
How it works
A fluid, gas, vacuum, or pneumatic flow-control component used to route or control process services.
Port size, material, seal type, pressure rating, leak integrity, and cleanliness are critical in semiconductor tools.
Technical guide
- PSI
- Pounds per square inch pressure unit.
- SST
- Stainless steel.
- VCR
- A high-purity metal-gasket face-seal fitting style.
What to verify before purchase
- Seal material and dimensions
- Vacuum/process compatibility
- New vs. used condition
Confirm with the seller
- Specific tool serial-number compatibility
- Current calibration or functional test status
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.