Product description
Quartz 8 inch EXT cathode ring/top ring for Applied Materials chamber use.
Specifications and identifiers
chamber hardware
| Material | Quartz Repeated as quartz/QTZ in source descriptions. |
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| Size | 8 inch / 200 mm context Both 8 inch and 200 mm wording appear. |
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| Application wording | EXT cath Likely external cathode/cathode-area ring context; exact abbreviation expansion is not confirmed. |
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Applications
etch and deposition process chambersESC and cathode surrounding hardwareconsumable chamber hardware replacementcathode-area quartz ring replacementetch chamber process hardware
How it works
A chamber ring is a shaped process-area component used around wafers, electrodes, shields, or chamber openings.
Rings influence plasma confinement, edge exclusion, process uniformity, and protection of more expensive chamber hardware.
Technical guide
Vespel
High-performance polyimide used in some confinement or insulating ring applications.
quartz
High-purity ceramic material often used where thermal and plasma compatibility are important.
tantalum/titanium
Metals used in PVD-related chamber hardware when process compatibility requires them.
What to verify before purchase
- Verify whether this is required as a ring, top ring, or EXT cathode ring for the specific chamber.
- Inspect quartz condition for chips, cracks, and process staining.
Confirm with the seller
- Exact tool configuration and compatibility are not confirmed beyond the part identity.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.