Product description
Blocker plate, SX, 6 inch, Applied Materials part 0020-30447.
Specifications and identifiers
Function
| Likely role | Process plate or shield used in a chamber flow/plasma stack |
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Identity
| Supported item noun | Blocker plate |
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| Size | 6 inch |
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| Design/context | SX |
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Applications
PVD/CVD/etch process chamberschamber rebuildsconsumable kitstool refurbishmentprocess chamber shieldinggas/plasma distribution stack service6-inch chamber component replacement
How it works
A mechanical chamber or process-area component used near the wafer, plasma, gas flow, or vacuum boundary of a semiconductor tool.
Geometry, coating, material, and revision can affect process uniformity, particle control, sealing, and compatibility with nearby assemblies.
What to verify before purchase
- Confirm exact chamber/platform and revision
- Check surface finish and coating requirements
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.