Product description
200 mm pedestal associated with 5200 references and sealless pedestal descriptions.
Specifications and identifiers
chamber
| Item form | Pedestal Wafer support or chamber pedestal component. |
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| Wafer size reference | 200 mm Repeated size reference. |
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| Platform/reference | 5200 / sealless pedestal references Tool/platform descriptors to verify against the drawing. |
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Applications
process chamber maintenancePVD/CVD/etch chamber hardwarewafer-handling or chamber interface assemblies200 mm chamber pedestal replacementWafer support hardware service
How it works
A chamber mechanical component is a physical part used in or around a process chamber, wafer handling area, or vacuum hardware.
Dimensional fit, material compatibility, surface condition, and revision can affect process performance, vacuum integrity, and particle control.
What to verify before purchase
- NDM variant and revision
- Sealing style
- Surface condition and coating
Confirm with the seller
- Exact 5200 chamber variant
- Whether NDM-226/276 variants are interchangeable
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.