Product description
Ring, clamp, Vespel, Poly/WSi, 200 mm
Specifications and identifiers
evidence fields
| Item noun | Ring, clamp Repeated across listing titles. |
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| Material | Vespel / polyimide High-temperature engineering plastic named in the titles. |
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| Process/size context | Poly/WSi, 200 mm Indicates likely process family and wafer-size context. |
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Applications
etch chamber hardware200 mm wafer process assembliespoly/WSi process environmentsretaining or locating chamber hardware around a 200 mm process areaplasma/etch-related chamber consumable or hardware
How it works
A clamp ring is a chamber or wafer-area retaining ring used to hold, locate, or shield components around a wafer/process region.
Correct ring material and wafer size matter because chamber parts are exposed to plasma, heat, chemicals, and tight mechanical clearances.
Technical guide
Vespel
High-performance polyimide often used where heat resistance, dimensional stability, and low particle generation are important.
- 200 mm
- Wafer size referenced by repeated evidence.
- Poly/WSi
- Likely polysilicon/tungsten silicide process context from the listing titles.
What to verify before purchase
- Confirm exact revision and dimensions against AMAT drawing or part label.
- Verify whether the item is genuine Vespel and not a substitute polyimide.
- Check for process contamination, chips, burn marks, or clamp-surface wear.
Confirm with the seller
- Exact tool model and chamber position are not confirmed.
- Compatibility beyond 200 mm Poly/WSi context is not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.