Product description
Gas box plate for SACVD dual-feed lid / BPSG context
Specifications and identifiers
supported identity
| Item type | Gas box plate Mechanical plate associated with gas distribution or gas-box hardware. |
|---|
| Process context | SACVD dual-feed lid / BPSG The evidence ties the part to SACVD/BPSG gas-box hardware. |
|---|
Applications
process chamber kitswafer support and lift hardwareshielding and gas distributionmechanical motion assembliesSACVD gas box hardwareBPSG dual-feed lid supportProcess gas distribution assembly service
How it works
A gas box plate is a mechanical process or handling component used inside or near a semiconductor process module.
Process-kit and handling components must match dimensions, material, coating, revision, and cleanliness requirements.
Technical guide
common
These parts may use aluminum, stainless steel, ceramic, quartz, graphite, elastomers, or coated surfaces depending on process use.
process_hardware
Chamber hardware controls gas flow, shielding, spacing, wafer support, and contamination control.
- CVD
- Chemical vapor deposition.
- ESC
- Electrostatic chuck.
- PVD
- Physical vapor deposition.
What to verify before purchase
- Confirm dimensions, sealing surfaces, and material.
- Verify whether the plate is for a dual-feed lid configuration.
- Inspect for contamination, corrosion, or damaged ports.
Confirm with the seller
- Exact material and port geometry are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.