0020-30673 / PLATE,GAS BOX, SACVD, DUAL FEED LID BPSG / APPLIED MATERIALS AMATL21035 (LOT OF 10) APPLIED MATERIALS PLATE, GAS BOX, SACVD (NEW) 0020-3067321035 APPLIED MATERIALS PLATE, GAS BOX, SACVD (NEW) 0020-30673AMAT Applied Materials Plate, Gas Box 0020-30673AMAT Applied Materials Plate, Gas Box 0020-30673AMAT Applied Materials Plate, Gas Box 0020-30673AMAT Applied Materials Plate, Gas Box 0020-30673AMAT Applied Materials Plate, Gas Box 0020-30673AMAT Applied Materials Plate, Gas Box 0020-30673AMAT Applied Materials Plate, Gas Box 0020-30673AMAT Applied Materials Plate, Gas Box 0020-30673AMAT Applied Materials Plate, Gas Box 0020-30673
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APPLIED MATERIALS 0020-30673

SACVD Gas Box Plate

Market Availability & Pricing

Part number0020-30673
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Mechanical › Gas Delivery › Gas Box Components
SACVD Gas Box Plate
APPLIED MATERIALS0020-30673gas box plate
Product description
Gas box plate for SACVD dual-feed lid / BPSG context
Specifications and identifiers
supported identity
Item typeGas box plate
Mechanical plate associated with gas distribution or gas-box hardware.
Process contextSACVD dual-feed lid / BPSG
The evidence ties the part to SACVD/BPSG gas-box hardware.
Equipment context
  • SACVD
  • BPSG
  • CVD
Applications
process chamber kitswafer support and lift hardwareshielding and gas distributionmechanical motion assembliesSACVD gas box hardwareBPSG dual-feed lid supportProcess gas distribution assembly service
How it works

A gas box plate is a mechanical process or handling component used inside or near a semiconductor process module.

Process-kit and handling components must match dimensions, material, coating, revision, and cleanliness requirements.

Technical guide
common

These parts may use aluminum, stainless steel, ceramic, quartz, graphite, elastomers, or coated surfaces depending on process use.

process_hardware

Chamber hardware controls gas flow, shielding, spacing, wafer support, and contamination control.

CVD
Chemical vapor deposition.
ESC
Electrostatic chuck.
PVD
Physical vapor deposition.
What to verify before purchase
  • Confirm dimensions, sealing surfaces, and material.
  • Verify whether the plate is for a dual-feed lid configuration.
  • Inspect for contamination, corrosion, or damaged ports.
Confirm with the seller
  • Exact material and port geometry are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

0020-30673 / PLATE,GAS BOX, SACVD, DUAL FEED LID BPSG / APPLIED MATERIALS AMAT

0020-30673 / PLATE,GAS BOX, SACVD, DUAL FEED LID BPSG / APPLIED MATERIALS AMAT

USD 1568.8900

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Feb 6, 2026 15:17 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 14, 2026 16:20 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
L21035 (LOT OF 10) APPLIED MATERIALS PLATE, GAS BOX, SACVD (NEW) 0020-30673

L21035 (LOT OF 10) APPLIED MATERIALS PLATE, GAS BOX, SACVD (NEW) 0020-30673

USD 2777.5000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: NEW
Listed: Jun 24, 2024 07:00 UTC
End recorded: Dec 7, 2024 12:35 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 7, 2026 16:03 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
21035 APPLIED MATERIALS PLATE, GAS BOX, SACVD (NEW) 0020-30673

21035 APPLIED MATERIALS PLATE, GAS BOX, SACVD (NEW) 0020-30673

USD 2028.94

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: NEW
Listed: Sep 8, 2020 07:07 UTC
End recorded: Dec 7, 2024 13:50 UTC
Estimated remaining at check: 31
Estimated sold at check: 0

eBay response captured — Checked Oct 21, 2026 11:17 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT Applied Materials Plate, Gas Box 0020-30673

AMAT Applied Materials Plate, Gas Box 0020-30673

USD 300.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Apr 7, 2019 22:34 UTC
End recorded: Dec 7, 2024 05:51 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 19, 2026 16:21 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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