Product description
Applied Materials 0020-30708 ring clamp, described as Vespel, REM FGR, aluminum, 150 mm flat.
Specifications and identifiers
identification
| Description | Ring clamp, Vespel, REM FGR |
|---|
| Nominal size | 150 mm |
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| Geometry | Flat |
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| Material note | Aluminum and Vespel wording appears in evidence |
|---|
Applications
PVD or CVD chamber kitsESC/focus-ring stackswafer-area consumables150 mm chamber clamp ring serviceWafer-area mechanical fixtureProcess-facing ring replacement
How it works
A shaped ring used around a wafer, chuck, or chamber opening as a process-facing mechanical component.
Geometry, material, coating, and cleanliness affect plasma behavior, sealing, contamination risk, and fit.
Technical guide
aluminum
common chamber hardware material
quartz
plasma-compatible ceramic glass used in high-temperature or plasma-exposed parts
stainless steel
metal used where durability and chemical resistance are needed
- 150 mm / 6 inch
- wafer-size class or ring nominal size
What to verify before purchase
- Verify material stack and whether Vespel is insert/coating/component
- Confirm dimensions and revision
- Check condition for wear, cracks, and contamination
Confirm with the seller
- Exact tool platform is not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.