Product description
Applied Materials 0020-30983 top chamber pumping plate / top chamber plate for P5000 CVD/PRSP context.
Specifications and identifiers
identification
| Description | Top chamber pumping plate / top chamber plate |
|---|
| Reported platform context | P5000 CVD / PRSP |
|---|
| Function | Chamber pumping/exhaust path hardware |
|---|
Equipment context
- Applied Materials P5000 CVD chamber
Applications
CVD/etch chamber hardwaregas distributionpumping/exhaust pathsCVD chamber pumping pathP5000 chamber hardwareProcess chamber plate replacement
How it works
A machined chamber plate used as part of a process chamber, pumping path, or gas distribution region.
Hole pattern, surface condition, flatness, and material determine fit and process behavior.
Technical guide
- pumping plate
- plate associated with chamber exhaust or pumping conductance
What to verify before purchase
- Verify dimensions, hole pattern, and chamber revision
- Inspect sealing/surface areas for damage or deposits
- Confirm PRSP/P5000 configuration before installation
Confirm with the seller
- Exact chamber revision is not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.