Product description
Plate, PRSP3
Specifications and identifiers
identification
| Part type | plate Mechanical plate component. |
|---|
| Descriptor | PRSP3 Application/design code present in the supplied wording; expansion not confirmed. |
|---|
Applications
chambersload lockspedestalsgas boxesrobot and wafer-handling assembliesmechanical plate replacementchamber or module hardware
How it works
A machined or formed component used for mounting, shielding, support, sealing, or gas/process hardware.
Small dimensional or material changes can affect vacuum sealing, plasma exposure, wafer clearance, or mechanical alignment.
Technical guide
aluminum
common lightweight machined tool material when stated
stainless steel
used for corrosion resistance and mechanical strength where stated
anodized
surface treatment for aluminum parts that improves wear/corrosion resistance when specified
- ASSY
- assembly
- ID
- inside diameter
- OD
- outside diameter
What to verify before purchase
- Verify PRSP3 meaning, dimensions, material, coating, and exact revision.
Confirm with the seller
- PRSP3 expansion and exact platform are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.