AMAT 0020-31147 INSERT, BASE, ALUM, 150/200MM, FLAT,0624-3068, 167467AMAT 0020-31147 Insert , BASE, ALUM, 150/200MM, FLAT, 166738AMAT 0020-31147 Insert , BASE, ALUM, 150/200MM, FLAT, 166739AMAT 0020-31147 Insert, Base, Alum, ISO, 200mm, Etch Chamber Cathode, 161487AMAT 0020-31147 INSERT, BASE, ALUM, 150/200MM, FLAT, 161127AMAT 0020-31147 Insert, Base, Alum, ISO, 200mm, Etch Chamber Cathode, 157828AMAT 0020-31147 INSERT, BASE, ALUM, 150/200MM, FLAT, 139679AMAT 0020-31147 INSERT, BASE, ALUM, 150/200MM, FLAT, 139616AMAT 0020-31147 Insert , BASE, ALUM, 150/200MM, FLAT, 117604AMAT 0020-31147 Insert, Base, Alum, ISO, 200mm, Etch Chamber Cathode, 114307AMAT 0020-31147 Insert, Base, Alum, ISO, 200mm, Etch Chamber Cathode, 114308AMAT 0020-31147 Insert, Base, Alum, ISO, 200mm, Etch Chamber Cathode, 114309AMAT 0020-31147 Insert, Base, Alum, ISO, 200mm, Etch Chamber Cathode, 114310AMAT 0020-31147 Insert, Base, Alum, ISO, 200mm, Etch Chamber Cathode, 110907AMAT 0020-31147 Insert, Base, Alum, ISO, 200mm, Etch Chamber Cathode, 110698Applied Materials 0020-31147 Insert Base, 150-200 MM AMAT EtchApplied Materials 0020-31147 Insert Base, 150-200 MM AMAT EtchAMAT 0020-31147 Insert, Base, Aluminum, 150/200MM Flat, 401781AMAT 0020-31147 Insert, Base, Aluminum, 150/200MM Flat, 401779AMAT 0020-31147 INSERT, BASE, ALUM, 150/200MM, FLAT , NEWAMAT 0020-31147 Insert, Base, Alum, ISO, 200mm, Etch Chamber Cathode, 118177APPLIED MATERIALS (AMAT) 0020-31147 2031147 INSERT, BASE, ALUM, 150/200MM, FLATAMAT 0020-31147 Insert, Base, Alum, ISO, 200mm, Etch Chamber Cathode, 417425AMAT 0020-31147 Insert, Base, Alum, ISO, 200mm, Etch Chamber Cathode, 417426AMAT Applied Materials 0020-31147 Base InsertAMAT P/N 0020-31147 Cathode Base Extension 150/200 MM, Stock #120AMAT P/N 0020-31147 Cathode Base Extension 150/200 MM, Stock #120AMAT P/N 0020-31147 Cathode Base Extension 150/200 MM, Stock #120AMAT P/N 0020-31147 Cathode Base Extension 150/200 MM, Stock #120AMAT P/N 0020-31147 Cathode Base Extension 150/200 MM, Stock #120AMAT P/N 0020-31147 Cathode Base Extension 150/200 MM, Stock #120AMAT P/N 0020-31147 Cathode Base Extension 150/200 MM, Stock #120AMAT P/N 0020-31147 Cathode Base Extension 150/200 MM, Stock #120AMAT P/N 0020-31147 Cathode Base Extension 150/200 MM, Stock #120AMAT P/N 0020-31147 Cathode Base Extension 150/200 MM, Stock #120AMAT P/N 0020-31147 Cathode Base Extension 150/200 MM, Stock #120AMAT P/N 0020-31147 Cathode Base Extension 150/200 MM, Stock #120AMAT P/N 0020-31147 Cathode Base Extension 150/200 MM, Stock #120AMAT P/N 0020-31147 Cathode Base Extension 150/200 MM, Stock #120APPLIED MATERIALS 0020-31147 Base InsertAMAT P/N 0020-31147 Cathode Base Extension 150/200 MM, Stock #120AMAT P/N 0020-31147 Cathode Base Extension 150/200 MM, Stock #120AMAT P/N 0020-31147 Cathode Base Extension 150/200 MM, Stock #120AMAT P/N 0020-31147 Cathode Base Extension 150/200 MM, Stock #120AMAT P/N 0020-31147 Cathode Base Extension 150/200 MM, Stock #120AMAT P/N 0020-31147 Cathode Base Extension 150/200 MM, Stock #120AMAT P/N 0020-31147 Cathode Base Extension 150/200 MM, Stock #120AMAT P/N 0020-31147 Cathode Base Extension 150/200 MM, Stock #120AMAT P/N 0020-31147 Cathode Base Extension 150/200 MM, Stock #120AMAT P/N 0020-31147 Cathode Base Extension 150/200 MM, Stock #120AMAT P/N 0020-31147 Cathode Base Extension 150/200 MM, Stock #120AMAT P/N 0020-31147 Cathode Base Extension 150/200 MMAMAT P/N 0020-31147 Cathode Base Extension 150/200 MMAMAT P/N 0020-31147 Cathode Base Extension 150/200 MMAMAT P/N 0020-31147 Cathode Base Extension 150/200 MMAMAT P/N 0020-31147 Cathode Base Extension 150/200 MMAMAT P/N 0020-31147 Cathode Base Extension 150/200 MMAMAT P/N 0020-31147 Cathode Base Extension 150/200 MMAMAT P/N 0020-31147 Cathode Base Extension 150/200 MMAMAT P/N 0020-31147 Cathode Base Extension 150/200 MMAMAT 0020-31147 FLAT ALUMINUM INSERT BASE 401770AMAT 0020-31147 Insert, Base, Aluminum, 150/200MM Flat, 401780AMAT 0020-31147 Insert, Base, AL, 150/200MM FlatAMAT 0020-31147 2031147 INSERT, BASE, ALUM, 150/200MM, FLAT
Image 1 of 64

APPLIED MATERIALS 0020-31147

Aluminum Base Insert, 150/200mm Flat

Market Availability & Pricing

Part number0020-31147
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Mechanical › Chamber Components › Chamber Inserts
Aluminum Base Insert, 150/200mm Flat
APPLIED MATERIALS0020-31147Aluminum base insert
Product description
Insert, base, aluminum, 150/200mm, flat.
Specifications and identifiers
identification
Evidence-backed item phraseAluminum Base Insert, 150/200mm Flat
Normalized from repeated listing titles.
ManufacturerAPPLIED MATERIALS
Manufacturer/OEM as provided in request.
Part number0020-31147
Part number from request.
observed ratings or dimensions
Observed title terms150/200MM, 200 MM, 200MM
Unverified listing-title terms; verify against label/drawing.
Equipment context
  • Specific platform not confirmed
Applications
process chamber consumable or structural hardware replacementmatching chamber geometry/material for maintenance
How it works

An aluminum base insert for 150/200 mm flat chamber or handling hardware.

Insert geometry and material affect fit and process compatibility.

Technical guide
aluminum

Evidence says ALUM/aluminum.

What to verify before purchase
  • exact revision/suffix and assembly configuration
  • physical condition, missing hardware, and contamination/cleanliness
  • material/coating, wafer size, chamber model, and dimensional match
Confirm with the seller
  • full OEM datasheet specifications
  • guaranteed tool compatibility beyond listing-title evidence

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

AMAT 0020-31147 INSERT, BASE, ALUM, 150/200MM, FLAT,0624-3068, 167467

AMAT 0020-31147 INSERT, BASE, ALUM, 150/200MM, FLAT,0624-3068, 167467

USD 1800.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Aug 20, 2024 23:30 UTC
End recorded: Dec 7, 2024 05:17 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 8, 2026 16:02 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-31147 Insert , BASE, ALUM, 150/200MM, FLAT, 166738

AMAT 0020-31147 Insert , BASE, ALUM, 150/200MM, FLAT, 166738

USD 650.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Aug 15, 2024 17:30 UTC
End recorded: Dec 7, 2024 12:13 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 7, 2026 16:27 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-31147 Insert , BASE, ALUM, 150/200MM, FLAT, 166739

AMAT 0020-31147 Insert , BASE, ALUM, 150/200MM, FLAT, 166739

USD 1800.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Aug 15, 2024 17:30 UTC
End recorded: Dec 7, 2024 12:13 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 7, 2026 16:27 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-31147 Insert, Base, Alum, ISO, 200mm, Etch Chamber Cathode, 161487

AMAT 0020-31147 Insert, Base, Alum, ISO, 200mm, Etch Chamber Cathode, 161487

USD 650.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jul 3, 2024 21:30 UTC
End recorded: Dec 7, 2024 02:53 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 7, 2026 16:11 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-31147 INSERT, BASE, ALUM, 150/200MM, FLAT, 161127

AMAT 0020-31147 INSERT, BASE, ALUM, 150/200MM, FLAT, 161127

USD 1700.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jul 1, 2024 18:00 UTC
End recorded: Dec 7, 2024 01:47 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 7, 2026 16:09 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-31147 Insert, Base, Alum, ISO, 200mm, Etch Chamber Cathode, 157828

AMAT 0020-31147 Insert, Base, Alum, ISO, 200mm, Etch Chamber Cathode, 157828

USD 650.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: May 24, 2024 18:01 UTC
End recorded: Dec 7, 2024 13:11 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 6, 2026 16:17 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-31147 INSERT, BASE, ALUM, 150/200MM, FLAT, 139679

AMAT 0020-31147 INSERT, BASE, ALUM, 150/200MM, FLAT, 139679

USD 1500.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 13, 2023 02:00 UTC
End recorded: Dec 7, 2024 06:28 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 4, 2026 16:10 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-31147 INSERT, BASE, ALUM, 150/200MM, FLAT, 139616

AMAT 0020-31147 INSERT, BASE, ALUM, 150/200MM, FLAT, 139616

USD 1800.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Dec 12, 2023 22:30 UTC
End recorded: Dec 6, 2024 21:15 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 4, 2026 16:10 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-31147 Insert , BASE, ALUM, 150/200MM, FLAT, 117604

AMAT 0020-31147 Insert , BASE, ALUM, 150/200MM, FLAT, 117604

USD 1800.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: May 18, 2023 21:00 UTC
End recorded: Dec 6, 2024 23:05 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:02 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-31147 Insert, Base, Alum, ISO, 200mm, Etch Chamber Cathode, 114307

AMAT 0020-31147 Insert, Base, Alum, ISO, 200mm, Etch Chamber Cathode, 114307

USD 650.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Feb 2, 2023 18:30 UTC
End recorded: Dec 7, 2024 07:22 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:14 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-31147 Insert, Base, Alum, ISO, 200mm, Etch Chamber Cathode, 114309

AMAT 0020-31147 Insert, Base, Alum, ISO, 200mm, Etch Chamber Cathode, 114309

USD 650.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Feb 2, 2023 18:30 UTC
End recorded: Dec 7, 2024 07:17 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:14 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-31147 Insert, Base, Alum, ISO, 200mm, Etch Chamber Cathode, 114308

AMAT 0020-31147 Insert, Base, Alum, ISO, 200mm, Etch Chamber Cathode, 114308

USD 650.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Feb 2, 2023 18:30 UTC
End recorded: Dec 7, 2024 07:20 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:14 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-31147 Insert, Base, Alum, ISO, 200mm, Etch Chamber Cathode, 114310

AMAT 0020-31147 Insert, Base, Alum, ISO, 200mm, Etch Chamber Cathode, 114310

USD 650.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Feb 2, 2023 18:30 UTC
End recorded: Dec 7, 2024 07:17 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:13 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-31147 Insert, Base, Alum, ISO, 200mm, Etch Chamber Cathode, 110907

AMAT 0020-31147 Insert, Base, Alum, ISO, 200mm, Etch Chamber Cathode, 110907

USD 650.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Oct 27, 2022 17:00 UTC
End recorded: Dec 7, 2024 01:43 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:23 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-31147 Insert, Base, Alum, ISO, 200mm, Etch Chamber Cathode, 110698

AMAT 0020-31147 Insert, Base, Alum, ISO, 200mm, Etch Chamber Cathode, 110698

USD 650.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Oct 13, 2022 22:30 UTC
End recorded: Dec 7, 2024 00:16 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:21 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
Applied Materials 0020-31147 Insert Base, 150-200 MM AMAT Etch

Applied Materials 0020-31147 Insert Base, 150-200 MM AMAT Etch

USD 1595.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Aug 4, 2018 00:59 UTC
End recorded: Dec 7, 2024 04:03 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 19, 2026 16:10 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Applied Materials 0020-31147 Insert Base, 150-200 MM AMAT Etch

Applied Materials 0020-31147 Insert Base, 150-200 MM AMAT Etch

USD 2100.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jul 28, 2016 18:52 UTC
End recorded: Dec 6, 2024 23:45 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 18, 2026 16:13 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-31147 Insert, Base, Aluminum, 150/200MM Flat, 401781

AMAT 0020-31147 Insert, Base, Aluminum, 150/200MM Flat, 401781

USD 1950.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: May 8, 2015 18:15 UTC
End recorded: Dec 6, 2024 20:57 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 17, 2026 16:23 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-31147 Insert, Base, Aluminum, 150/200MM Flat, 401779

AMAT 0020-31147 Insert, Base, Aluminum, 150/200MM Flat, 401779

USD 1800.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: May 8, 2015 18:07 UTC
End recorded: Dec 6, 2024 20:57 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 17, 2026 16:23 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-31147 INSERT, BASE, ALUM, 150/200MM, FLAT , NEW

AMAT 0020-31147 INSERT, BASE, ALUM, 150/200MM, FLAT , NEW

USD 2500.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: NEW
Listed: Jan 19, 2015 02:19 UTC
End recorded: Dec 6, 2024 20:50 UTC
Estimated remaining at check: 1
Estimated sold at check: 1

eBay response captured — Checked Oct 17, 2026 16:22 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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