| Function | focusing ring Process-facing chamber ring used around the wafer area. |
|---|---|
| Material | aluminum / AL Repeated evidence states ALUM or Al. |
| Size | 200mm Repeated in the evidence. |
| Platform/context term | PRSP 3 Evidence-specific context term; exact tool meaning should be checked. |
A chamber ring is a precision mechanical component used around the wafer or chamber opening for focus, insulation, confinement, filler, cover, or shielding functions.
Diameter, material, coating, and chamber position are critical because rings are often process-facing and fit-specific.
Aluminum rings are often machined chamber hardware and may be anodized or coated.
Ceramic rings provide electrical insulation and can tolerate high-temperature or plasma-adjacent service.
Quartz is used for high-purity, temperature-tolerant process-facing chamber parts.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.
No public documents were listed for this part when captured.
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Observed public listing price, not an accepted sale amount.
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eBay response captured — Checked Oct 6, 2026 16:06 UTC
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eBay response captured — Checked Oct 6, 2026 16:06 UTC
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eBay response captured — Checked Oct 6, 2026 16:06 UTC
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eBay response captured — Checked Oct 6, 2026 16:05 UTC
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eBay response captured — Checked Oct 6, 2026 16:05 UTC
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eBay response captured — Checked Oct 6, 2026 16:05 UTC
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eBay response captured — Checked Oct 6, 2026 16:05 UTC
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eBay response captured — Checked Oct 6, 2026 16:05 UTC
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eBay response captured — Checked Oct 2, 2026 16:22 UTC
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eBay response captured — Checked Oct 19, 2026 16:04 UTC
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Auction listing history. Direct marketplace listings are shown separately.
| Currency | Price basis | Records | Minimum | Maximum | Mean |
|---|---|---|---|---|---|
| USD | Observed public listing prices | 15 | 500.0000 | 3500.0000 | 3110.4000000000000000 |
Amounts without an established currency are retained in the history below and excluded from monetary comparisons. Bids, public listing prices and accepted amounts are distinct; no currency conversion is applied.
| Time recorded | Listing | Observation | Public price | Recorded acceptance |
|---|---|---|---|---|
| Jul 22, 2026 12:48 UTC | 0020-31163 / RING, FOCUSING, ALUM, 200MM, PRSP 3 / APPLIED MATERIALS AMAT | Completed listing price | 2871.13 (currency not captured) | Not established |
| Jan 18, 2026 13:44 UTC | 0020-31163 / RING, FOCUSING, ALUM, 200MM, PRSP 3 / APPLIED MATERIALS AMAT | Completed listing price | 2540.82 (currency not captured) | Not established |
| Dec 20, 2022 12:07 UTC | 0020-31163 / RING, FOCUSING, ALUM, 200MM, PRSP 3 / APPLIED MATERIALS AMAT | Completed listing price | 2540.82 (currency not captured) | Not established |
| Jul 1, 2022 01:26 UTC | 0020-31163 | Completed listing price | 2499.95 (currency not captured) | Not established |
| Nov 20, 2015 06:06 UTC | AMAT 0020-31163 Ring, Focus, Al, 200MM, PRSP3, 401370 | Completed listing price | 350 (currency not captured) | Not established |
Public listing prices, direct recorded sale prices and recorded accepted Best Offer amounts remain distinct. Quantities are source estimates. No aggregate sales total or average is inferred.
Prices and availability may change. Confirm details with the seller.
Observed public listing price, not an accepted sale amount.
eBay response captured — Checked Aug 29, 2026 16:03 UTC
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Legacy record; no enhanced status check captured
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