Product description
CVD chamber hinge, also referenced in vacuum-port/slit-window and throttle-valve housing assemblies.
Specifications and identifiers
mechanical
| Item form | Hinge Mechanical hinge associated with a CVD chamber or vacuum-port/slit-window assembly. |
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| Associated assemblies | CVD chamber, vacuum port slit window, throttle valve housing references Related assembly contexts that may use this hinge. |
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Applications
process chamber maintenancePVD/CVD/etch chamber hardwarewafer-handling or chamber interface assembliesChamber hinge replacementVacuum-port or throttle-valve housing service
How it works
A chamber mechanical component is a physical part used in or around a process chamber, wafer handling area, or vacuum hardware.
Dimensional fit, material compatibility, surface condition, and revision can affect process performance, vacuum integrity, and particle control.
What to verify before purchase
- Whether the needed item is the hinge only or a larger assembly
- Mounting hole pattern and side/orientation
- CVD chamber variant
Confirm with the seller
- Exact mating assembly without tool drawing
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.