AMAT 0040-09008 AMP FRAME VACUUM PORT SLIT WIN, AMAT 0020-31282, 163895AMAT 0020-31282 HINGE, 142475AMAT 0020-31282 HINGE, CVD CHAMBER, 142167AMAT 0020-31282 HINGE, CVD CHAMBER, 142168AMAT 0020-31282 HINGE, CVD CHAMBER, 142169AMAT 0010-76173THROTTLE VALVE HOUSING AMAT 0020-31282 HINGE, CVD CHAMBER, 129385AMAT AMP FRAME, VACUUM PORT SLIT WIN, AMAT 0020-31282 Hinge VCD, 127765AMAT 0010-76173 Throttle Valve Housing, 0020-31282 Hinge CVD Chamber, 127664AMAT AMP FRAME, VACUUM PORT SLIT WIN, 0020-31282 Hinge VCD, Nor-Cal Valve,127591AMAT 0040-09008 AMP FRAME, VACUUM PORT SLIT WIN, 0020-31282 Hinge VCD, 106286AMAT 0040-09008 AMP FRAME, VACUUM PORT SLIT WIN, 0020-31282 Hinge VCD, 106285
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APPLIED MATERIALS 0020-31282

CVD chamber hinge

Market Availability & Pricing

Part number0020-31282
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Mechanical › Chamber Components › Process Chamber Hardware
CVD chamber hinge
APPLIED MATERIALS0020-31282chamber hinge
Product description
CVD chamber hinge, also referenced in vacuum-port/slit-window and throttle-valve housing assemblies.
Specifications and identifiers
mechanical
Item formHinge
Mechanical hinge associated with a CVD chamber or vacuum-port/slit-window assembly.
Associated assembliesCVD chamber, vacuum port slit window, throttle valve housing references
Related assembly contexts that may use this hinge.
Applications
process chamber maintenancePVD/CVD/etch chamber hardwarewafer-handling or chamber interface assembliesChamber hinge replacementVacuum-port or throttle-valve housing service
How it works

A chamber mechanical component is a physical part used in or around a process chamber, wafer handling area, or vacuum hardware.

Dimensional fit, material compatibility, surface condition, and revision can affect process performance, vacuum integrity, and particle control.

What to verify before purchase
  • Whether the needed item is the hinge only or a larger assembly
  • Mounting hole pattern and side/orientation
  • CVD chamber variant
Confirm with the seller
  • Exact mating assembly without tool drawing

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

AMAT 0040-09008 AMP FRAME VACUUM PORT SLIT WIN, AMAT 0020-31282, 163895

AMAT 0040-09008 AMP FRAME VACUUM PORT SLIT WIN, AMAT 0020-31282, 163895

USD 750.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jul 25, 2024 21:00 UTC
End recorded: Dec 7, 2024 07:03 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 7, 2026 16:20 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-31282 HINGE, 142475

AMAT 0020-31282 HINGE, 142475

USD 200.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jan 8, 2024 22:00 UTC
End recorded: Dec 7, 2024 07:26 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 4, 2026 16:20 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-31282 HINGE, CVD CHAMBER, 142167

AMAT 0020-31282 HINGE, CVD CHAMBER, 142167

USD 200.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jan 5, 2024 18:30 UTC
End recorded: Dec 6, 2024 21:50 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 4, 2026 16:19 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-31282 HINGE, CVD CHAMBER, 142168

AMAT 0020-31282 HINGE, CVD CHAMBER, 142168

USD 200.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jan 5, 2024 18:30 UTC
End recorded: Dec 6, 2024 21:49 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 4, 2026 16:19 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-31282 HINGE, CVD CHAMBER, 142169

AMAT 0020-31282 HINGE, CVD CHAMBER, 142169

USD 200.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jan 5, 2024 18:30 UTC
End recorded: Dec 6, 2024 21:49 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 4, 2026 16:19 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0010-76173THROTTLE VALVE HOUSING AMAT 0020-31282 HINGE, CVD CHAMBER, 129385

AMAT 0010-76173THROTTLE VALVE HOUSING AMAT 0020-31282 HINGE, CVD CHAMBER, 129385

USD 1200.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 29, 2023 21:00 UTC
End recorded: Dec 7, 2024 11:57 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 3, 2026 16:11 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT AMP FRAME, VACUUM PORT SLIT WIN, AMAT 0020-31282 Hinge VCD, 127765

AMAT AMP FRAME, VACUUM PORT SLIT WIN, AMAT 0020-31282 Hinge VCD, 127765

USD 995.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 13, 2023 22:00 UTC
End recorded: Dec 6, 2024 18:54 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 3, 2026 16:05 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0010-76173 Throttle Valve Housing, 0020-31282 Hinge CVD Chamber, 127664

AMAT 0010-76173 Throttle Valve Housing, 0020-31282 Hinge CVD Chamber, 127664

USD 750.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 13, 2023 16:30 UTC
End recorded: Dec 6, 2024 18:59 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 3, 2026 16:04 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT AMP FRAME, VACUUM PORT SLIT WIN, 0020-31282 Hinge VCD, Nor-Cal Valve,127591

AMAT AMP FRAME, VACUUM PORT SLIT WIN, 0020-31282 Hinge VCD, Nor-Cal Valve,127591

USD 995.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 12, 2023 20:30 UTC
End recorded: Dec 7, 2024 02:43 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 3, 2026 16:04 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0040-09008 AMP FRAME, VACUUM PORT SLIT WIN, 0020-31282 Hinge VCD, 106286

AMAT 0040-09008 AMP FRAME, VACUUM PORT SLIT WIN, 0020-31282 Hinge VCD, 106286

USD 750.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jun 6, 2022 22:30 UTC
End recorded: Mar 9, 2025 23:28 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:05 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay

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