Product description
Lid for BWCVD mixer gas box, with one conflicting sleeve description treated as noise.
Specifications and identifiers
identified attributes
| Component | Mixer gas box lid |
|---|
| Process/tool context | BWCVD |
|---|
| Primary function | Covers/encloses mixer gas-box hardware |
|---|
Applications
Process chamber kitsPVD/CVD/etch chamber maintenanceWafer-edge or pedestal-area hardwareGas box mechanical serviceBWCVD gas delivery assembly repair
How it works
A chamber or wafer-area mechanical component used near the wafer, pedestal, or plasma/process region.
Geometry, material, surface condition, and revision can affect process uniformity, particle generation, and chamber fit.
Technical guide
- ESC
- Electrostatic chuck; a wafer-holding chuck that uses electrostatic force.
What to verify before purchase
- Confirm whether the needed item is the lid and not the conflicting sleeve source.
- Verify material, revision, and gasket/seal requirements.
Confirm with the seller
- Exact material and dimensions are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.