AMAT 0020-31609 RF Cover Shield Interlock Delta SACVD Aluminum, 117121AMAT 0020-31609 RF Cover Shield Interlock Delta SACVD Aluminum, 117122AMAT 0020-31609 RF Cover Shield Interlock Delta SACVD Aluminum, 112771AMAT 0020-31609 RF Cover Shield Interlock Delta SACVD Aluminum, 112678AMAT 0020-31609 RF Cover Shield Interlock Delta SACVD Aluminum, 112677AMAT 0020-31609 RF Cover Shield Interlock Delta SACVD Aluminum, 112654AMAT 0020-31609 RF Cover Shield Interlock Delta SACVD Aluminum, 111826AMAT 0020-31609 RF Cover Shield Interlock Delta SACVD Aluminum, 111023AMAT 0020-31609 RF Cover Shield Interlock Delta SACVD Aluminum, 111025AMAT 0020-31609 RF Cover Shield Interlock Delta SACVD Aluminum, 111024AMAT 0020-31609 RF Cover Shield Interlock Delta SACVD Aluminum, 110477115-0501// AMAT APPLIED 0020-31609 COVER RF SHIELD INTERLCK DELTA SACVD [USED]AMAT Applied Materials 0020-31609 RF Cover Shield Interlock Delta SACVD Working7592 APPLIED MATERIALS COVER RF SHIELD INTLK DELTA 0020-31609Applied Materials (AMAT) 0020-31609 COVER RF SHIELD INTERLCK DELTA SACVD ALUAMAT 0020-31609 COVER RF SHIELD INTERLCK DELTA SACVD ALUAMAT 0020-31609 COVER RF SHIELD INTERLCK DELTA SACVD ALUAPPLIED MATERIALS (AMAT) 0020-31609 COVER RF SHIELD INTERLCK DELTA SACVD ALU
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APPLIED MATERIALS 0020-31609

Delta SACVD aluminum RF cover shield interlock

Market Availability & Pricing

Part number0020-31609
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Mechanical › Chamber Components › RF Shields
Delta SACVD aluminum RF cover shield interlock
APPLIED MATERIALS0020-31609RF cover shield interlock
Product description
Aluminum RF cover shield interlock for Delta SACVD context.
Specifications and identifiers
identification
OEM part number0020-31609
Normalized descriptionCover, RF shield interlock, Delta SACVD, aluminum
Material referencedAluminum / ALU
Material is consistently referenced but should still be verified if critical.
Platform/process contextDelta SACVD
Equipment context
  • Applied Materials Delta SACVD
Applications
RF shieldingSACVD chamber/service coversequipment safety interlocksRF shielding cover replacementinterlock cover hardwareDelta SACVD service hardware
How it works

An RF cover shield is a protective or shielding component associated with RF hardware and access/interlock areas.

Shielding and interlock hardware help control RF exposure, maintain safe access states, and protect nearby components.

Technical guide
ALU
Aluminum.
RF
Radio frequency.
SACVD
Sub-atmospheric chemical vapor deposition.
What to verify before purchase
  • Confirm aluminum condition and any coating/anodize.
  • Inspect interlock features and fastener points.
  • Confirm exact Delta SACVD tool configuration.
Confirm with the seller
  • Exact dimensions.
  • Revision.
  • Compatibility beyond Delta SACVD context.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

AMAT 0020-31609 RF Cover Shield Interlock Delta SACVD Aluminum, 117122

AMAT 0020-31609 RF Cover Shield Interlock Delta SACVD Aluminum, 117122

USD 950.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: May 12, 2023 17:00 UTC
End recorded: Dec 6, 2024 23:27 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:01 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-31609 RF Cover Shield Interlock Delta SACVD Aluminum, 117121

AMAT 0020-31609 RF Cover Shield Interlock Delta SACVD Aluminum, 117121

USD 950.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: May 12, 2023 17:00 UTC
End recorded: Dec 6, 2024 23:27 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:01 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-31609 RF Cover Shield Interlock Delta SACVD Aluminum, 112771

AMAT 0020-31609 RF Cover Shield Interlock Delta SACVD Aluminum, 112771

USD 950.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 30, 2022 19:00 UTC
End recorded: Dec 7, 2024 10:55 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:08 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-31609 RF Cover Shield Interlock Delta SACVD Aluminum, 112678

AMAT 0020-31609 RF Cover Shield Interlock Delta SACVD Aluminum, 112678

USD 950.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 28, 2022 22:00 UTC
End recorded: Dec 7, 2024 14:09 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:07 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-31609 RF Cover Shield Interlock Delta SACVD Aluminum, 112677

AMAT 0020-31609 RF Cover Shield Interlock Delta SACVD Aluminum, 112677

USD 950.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 28, 2022 22:00 UTC
End recorded: Dec 7, 2024 14:10 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:07 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-31609 RF Cover Shield Interlock Delta SACVD Aluminum, 112654

AMAT 0020-31609 RF Cover Shield Interlock Delta SACVD Aluminum, 112654

USD 950.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 28, 2022 19:00 UTC
End recorded: Dec 6, 2024 21:13 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:07 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-31609 RF Cover Shield Interlock Delta SACVD Aluminum, 111826

AMAT 0020-31609 RF Cover Shield Interlock Delta SACVD Aluminum, 111826

USD 950.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Nov 29, 2022 18:00 UTC
End recorded: Feb 19, 2025 00:22 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:03 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-31609 RF Cover Shield Interlock Delta SACVD Aluminum, 111023

AMAT 0020-31609 RF Cover Shield Interlock Delta SACVD Aluminum, 111023

USD 950.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Nov 2, 2022 17:00 UTC
End recorded: Dec 6, 2024 16:41 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:24 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-31609 RF Cover Shield Interlock Delta SACVD Aluminum, 111025

AMAT 0020-31609 RF Cover Shield Interlock Delta SACVD Aluminum, 111025

USD 950.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Nov 2, 2022 17:00 UTC
End recorded: Dec 6, 2024 16:40 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:24 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-31609 RF Cover Shield Interlock Delta SACVD Aluminum, 111024

AMAT 0020-31609 RF Cover Shield Interlock Delta SACVD Aluminum, 111024

USD 950.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Nov 2, 2022 17:00 UTC
End recorded: Dec 6, 2024 16:40 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:24 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-31609 RF Cover Shield Interlock Delta SACVD Aluminum, 110477

AMAT 0020-31609 RF Cover Shield Interlock Delta SACVD Aluminum, 110477

USD 950.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Oct 11, 2022 23:30 UTC
End recorded: Dec 7, 2024 01:30 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:20 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
115-0501// AMAT APPLIED 0020-31609 COVER RF SHIELD INTERLCK DELTA SACVD [USED]

115-0501// AMAT APPLIED 0020-31609 COVER RF SHIELD INTERLCK DELTA SACVD [USED]

USD 1120.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Jul 9, 2020 06:45 UTC
End recorded: Dec 7, 2024 10:58 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 20, 2026 16:21 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay

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