0020-31639 / INSERT, INNER, NI, 200MM ,ESC / APPLIED MATERIALS AMATAMAT 0020-31639 COIL, SYMMETRICAL, Insert, NI, Inner, 200MM ESC, 161136AMAT 0020-31639 COIL, SYMMETRICAL, Insert, NI, Inner, 200MM ESC, 161137AMAT 0020-31639 COIL, SYMMETRICAL, Insert, NI, Inner, 200MM ESC, 161138AMAT 0020-31639 COIL, SYMMETRICAL, Insert, NI, Inner, 200MM ESC, 161139AMAT 0020-31639 COIL, SYMMETRICAL, Insert, NI, Inner, 200MM ESC, 161094AMAT 0020-31639 COIL, SYMMETRICAL, Insert, NI, Inner, 200MM ESC, 161095AMAT 0020-31639 COIL, SYMMETRICAL, Insert, NI, Inner, 200MM ESC, 158329AMAT 0020-31639 COIL, SYMMETRICAL, Insert, NI, Inner, 200MM ESC, 158330AMAT 0020-31639 COIL, SYMMETRICAL, Insert, NI, Inner, 200MM ESC, 158331AMAT 0020-31639 COIL, SYMMETRICAL, Insert, NI, Inner, 200MM ESC 0020-31639 / INSERT,INNER,NI,20MM,ESC / APPLIED MATERIALS AMAT
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APPLIED MATERIALS 0020-31639

Symmetrical Inner Coil Insert for 200 mm ESC

Market Availability & Pricing

Part number0020-31639
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales743.93 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Electrostatic Chuck Components
Symmetrical Inner Coil Insert for 200 mm ESC
APPLIED MATERIALS0020-31639ESC coil insert
Product description
Coil / symmetrical insert, nickel inner component for 200 mm electrostatic chuck use.
Specifications and identifiers
identification
Component descriptionCoil, symmetrical insert
Position / styleInner
Material notationNI
Likely nickel or nickel-related material notation; verify from markings or OEM documentation.
Wafer size context200 mm
Associated assembly contextESC
Electrostatic chuck context indicated by the part evidence.
Applications
200 mm electrostatic chuck assembliesCVD/PVD/etch chamber serviceChamber hardware replacementElectrostatic chuck hardware maintenance200 mm chamber component replacement
How it works

A shaped inner insert/coil-style component associated with a 200 mm electrostatic chuck assembly.

ESC-related inserts and coils are chamber-critical parts; dimensional fit and material compatibility affect chuck performance and process reliability.

Technical guide
NI

Material notation in the evidence; verify whether this means nickel or another OEM-specific abbreviation.

ESC
Electrostatic chuck, a wafer-holding assembly that uses electrostatic force.
What to verify before purchase
  • Confirm exact material and coating from the part label or drawing.
  • Verify 200 mm ESC fit and revision before installation.
Confirm with the seller
  • Exact tool compatibility beyond the referenced family/context is not confirmed.
  • Revision-specific substitutions are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

0020-31639 / INSERT, INNER, NI, 200MM ,ESC / APPLIED MATERIALS AMAT

0020-31639 / INSERT, INNER, NI, 200MM ,ESC / APPLIED MATERIALS AMAT

USD 350.5600

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 10, 2025 16:12 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 14, 2026 16:06 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-31639 COIL, SYMMETRICAL, Insert, NI, Inner, 200MM ESC, 161136

AMAT 0020-31639 COIL, SYMMETRICAL, Insert, NI, Inner, 200MM ESC, 161136

USD 750.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Jul 1, 2024 18:30 UTC
End recorded: Dec 7, 2024 02:26 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 7, 2026 16:09 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-31639 COIL, SYMMETRICAL, Insert, NI, Inner, 200MM ESC, 161137

AMAT 0020-31639 COIL, SYMMETRICAL, Insert, NI, Inner, 200MM ESC, 161137

USD 750.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Jul 1, 2024 18:30 UTC
End recorded: Dec 7, 2024 02:26 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 7, 2026 16:09 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-31639 COIL, SYMMETRICAL, Insert, NI, Inner, 200MM ESC, 161138

AMAT 0020-31639 COIL, SYMMETRICAL, Insert, NI, Inner, 200MM ESC, 161138

USD 750.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Jul 1, 2024 18:30 UTC
End recorded: Dec 7, 2024 02:26 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 7, 2026 16:09 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-31639 COIL, SYMMETRICAL, Insert, NI, Inner, 200MM ESC, 161139

AMAT 0020-31639 COIL, SYMMETRICAL, Insert, NI, Inner, 200MM ESC, 161139

USD 750.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Jul 1, 2024 18:30 UTC
End recorded: Dec 7, 2024 02:26 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 7, 2026 16:09 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-31639 COIL, SYMMETRICAL, Insert, NI, Inner, 200MM ESC, 161094

AMAT 0020-31639 COIL, SYMMETRICAL, Insert, NI, Inner, 200MM ESC, 161094

USD 750.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Jun 29, 2024 00:00 UTC
End recorded: Dec 7, 2024 05:19 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 7, 2026 16:09 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-31639 COIL, SYMMETRICAL, Insert, NI, Inner, 200MM ESC, 161095

AMAT 0020-31639 COIL, SYMMETRICAL, Insert, NI, Inner, 200MM ESC, 161095

USD 750.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Jun 29, 2024 00:00 UTC
End recorded: Dec 7, 2024 05:19 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 7, 2026 16:09 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-31639 COIL, SYMMETRICAL, Insert, NI, Inner, 200MM ESC, 158329

AMAT 0020-31639 COIL, SYMMETRICAL, Insert, NI, Inner, 200MM ESC, 158329

USD 350.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: May 31, 2024 18:30 UTC
End recorded: Dec 6, 2024 22:40 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 6, 2026 16:19 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-31639 COIL, SYMMETRICAL, Insert, NI, Inner, 200MM ESC, 158330

AMAT 0020-31639 COIL, SYMMETRICAL, Insert, NI, Inner, 200MM ESC, 158330

USD 350.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: May 31, 2024 18:30 UTC
End recorded: Dec 6, 2024 22:40 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 6, 2026 16:19 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-31639 COIL, SYMMETRICAL, Insert, NI, Inner, 200MM ESC, 158331

AMAT 0020-31639 COIL, SYMMETRICAL, Insert, NI, Inner, 200MM ESC, 158331

USD 350.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: May 31, 2024 18:30 UTC
End recorded: Dec 6, 2024 22:40 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 6, 2026 16:19 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-31639 COIL, SYMMETRICAL, Insert, NI, Inner, 200MM ESC

AMAT 0020-31639 COIL, SYMMETRICAL, Insert, NI, Inner, 200MM ESC

USD 750.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Apr 30, 2014 20:45 UTC
End recorded: Dec 6, 2024 19:27 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 17, 2026 16:17 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay

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