0020-31664 / AMAT BAFFLE, PURGE, CHAMBER, BWCD / APPLIED MATERIALSAMAT 0020-31664 BAFFLE, PURGE, CHAMBER, BWCD, 0020-31664-A, 150097AMAT 0020-31664 BAFFLE, PURGE, CHAMBER, BWCD, 0020-31664-A, 150096AMAT 0020-31664 BAFFLE, PURGE, CHAMBER, BWCD, 0020-31664-A, 150098AMAT 0020-31664 / BAFFLE, PURGE, CHAMBER, BWCD, 150016AMAT 0020-31664 / BAFFLE, PURGE, CHAMBER, BWCD, 150012AMAT 0020-31664 / BAFFLE, PURGE, CHAMBER, BWCD, 150013AMAT 0020-31664 / BAFFLE, PURGE, CHAMBER, BWCD, 150014AMAT 0020-31664 / BAFFLE, PURGE, CHAMBER, BWCD, 150015AMAT 0020-31664 Baffle, Purge, Chamber, BWCD125-0302// AMAT APPLIED 0020-31664 BAFFLE, BOTTOM PURGE NEWAMAT 0020-31664 Rev.A, 94-J0331-00, Bottom Purge, Manifold, CVD Chamber. 417451AMAT 0020-31664 Rev.A, 94-J0331-00, Bottom Purge, Manifold, CVD Chamber. 4174490020-31664 / BAFFLE, PURGE, CHAMBER, BWCD / APPLIED MATERIALS AMAT	AMAT 0020-31664 Baffle, Purge, Chamber, BWCDAMAT 0020-31664 Baffle, Purge, Chamber, BWCD
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APPLIED MATERIALS 0020-31664

BWCD Chamber Purge Baffle

Market Availability & Pricing

Part number0020-31664
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Mechanical › Chamber Components › Baffles & Manifolds
BWCD Chamber Purge Baffle
APPLIED MATERIALS0020-31664Chamber purge baffle
Product description
Baffle, purge chamber, BWCD; bottom purge / CVD chamber manifold context
Specifications and identifiers
Configuration
ContextBWCD / CVD chamber
Context stated in provided evidence.
Identity
FunctionPurge chamber baffle
Baffle/manifold component associated with chamber purge gas flow.
Revision/variant
Related marking0020-31664-A / Rev. A
Variant or revision wording appears in provided evidence.
Applications
CVD chamber purge assembliesbottom purge manifoldsgas distribution hardwareCVD chamber purge hardwareBottom purge manifold serviceChamber gas-flow component replacement
How it works

A baffle helps direct, diffuse, or shield gas flow within a chamber or purge path.

Baffle geometry and cleanliness can affect purge behavior, particle control, and chamber service fit.

Technical guide
baffle
A flow-directing or shielding component.
purge
A gas flow used to clear or protect a chamber region.
What to verify before purchase
  • Confirm BWCD/CVD chamber context.
  • Check Rev. A or suffix markings.
  • Inspect sealing surfaces and purge-port geometry.
Confirm with the seller
  • Exact tool compatibility beyond the stated platform/context is not confirmed.
  • Operating condition and calibration status are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

0020-31664 / AMAT BAFFLE, PURGE, CHAMBER, BWCD / APPLIED MATERIALS

0020-31664 / AMAT BAFFLE, PURGE, CHAMBER, BWCD / APPLIED MATERIALS

USD 1975.5600

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Feb 27, 2025 19:00 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 11, 2026 16:12 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-31664 BAFFLE, PURGE, CHAMBER, BWCD, 0020-31664-A, 150097

AMAT 0020-31664 BAFFLE, PURGE, CHAMBER, BWCD, 0020-31664-A, 150097

USD 1750.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Mar 13, 2024 18:30 UTC
End recorded: Dec 7, 2024 00:15 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:22 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-31664 BAFFLE, PURGE, CHAMBER, BWCD, 0020-31664-A, 150098

AMAT 0020-31664 BAFFLE, PURGE, CHAMBER, BWCD, 0020-31664-A, 150098

USD 1750.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Mar 13, 2024 18:30 UTC
End recorded: Dec 7, 2024 00:15 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:22 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-31664 BAFFLE, PURGE, CHAMBER, BWCD, 0020-31664-A, 150096

AMAT 0020-31664 BAFFLE, PURGE, CHAMBER, BWCD, 0020-31664-A, 150096

USD 1750.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Mar 13, 2024 18:30 UTC
End recorded: Dec 7, 2024 00:15 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:22 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-31664 / BAFFLE, PURGE, CHAMBER, BWCD, 150016

AMAT 0020-31664 / BAFFLE, PURGE, CHAMBER, BWCD, 150016

USD 2000.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Mar 12, 2024 19:30 UTC
End recorded: Dec 7, 2024 11:20 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:21 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-31664 / BAFFLE, PURGE, CHAMBER, BWCD, 150012

AMAT 0020-31664 / BAFFLE, PURGE, CHAMBER, BWCD, 150012

USD 2000.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Mar 12, 2024 19:30 UTC
End recorded: Dec 7, 2024 11:20 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:21 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-31664 / BAFFLE, PURGE, CHAMBER, BWCD, 150013

AMAT 0020-31664 / BAFFLE, PURGE, CHAMBER, BWCD, 150013

USD 2000.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Mar 12, 2024 19:30 UTC
End recorded: Dec 7, 2024 11:20 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:21 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-31664 / BAFFLE, PURGE, CHAMBER, BWCD, 150014

AMAT 0020-31664 / BAFFLE, PURGE, CHAMBER, BWCD, 150014

USD 2000.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Mar 12, 2024 19:30 UTC
End recorded: Dec 7, 2024 11:20 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:21 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-31664 / BAFFLE, PURGE, CHAMBER, BWCD, 150015

AMAT 0020-31664 / BAFFLE, PURGE, CHAMBER, BWCD, 150015

USD 2000.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Mar 12, 2024 19:30 UTC
End recorded: Dec 7, 2024 11:20 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:21 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-31664 Baffle, Purge, Chamber, BWCD

AMAT 0020-31664 Baffle, Purge, Chamber, BWCD

USD 4374.9500

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Aug 14, 2020 09:25 UTC
End recorded: Dec 7, 2024 12:01 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 20, 2026 16:27 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
125-0302// AMAT APPLIED 0020-31664 BAFFLE, BOTTOM PURGE NEW

125-0302// AMAT APPLIED 0020-31664 BAFFLE, BOTTOM PURGE NEW

USD 2200.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Jul 8, 2019 01:48 UTC
End recorded: Dec 7, 2024 06:49 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 19, 2026 16:25 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-31664 Rev.A, 94-J0331-00, Bottom Purge, Manifold, CVD Chamber. 417451

AMAT 0020-31664 Rev.A, 94-J0331-00, Bottom Purge, Manifold, CVD Chamber. 417451

USD 1750.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Oct 20, 2016 19:00 UTC
End recorded: Dec 7, 2024 00:20 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 18, 2026 16:16 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay

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