Product description
Delrin adapter for Applied Materials equipment.
Specifications and identifiers
part attributes
| Item type | Adapter Identified. |
|---|
| Material | Delrin Polymer material term is consistent. |
|---|
| Function | Mechanical adapter Specific mating geometry should be verified from the physical part. |
|---|
Applications
process chamberspedestal and wafer support areasgas distribution and pumping pathsPVD/CVD chamber kitsmechanical adaptationnon-metallic fixture or spacer replacementtool hardware service
How it works
A chamber or process-module hardware component used around the wafer, pedestal, plasma, gas distribution, or chamber body area.
Geometry, material, coating, wafer size, and process family are critical because these parts affect plasma exposure, thermal behavior, contamination control, and mechanical fit.
Technical guide
Vespel
A high-performance polyimide used for selected high-temperature or low-outgassing hardware.
ceramic
Ceramic parts are common in plasma-facing or high-temperature regions because of electrical insulation and process resistance.
quartz
Quartz is used where optical transmission, thermal behavior, or chemical cleanliness is important.
sapphire
Sapphire windows or lenses are used where optical transmission and hardness are needed.
- ESC
- Electrostatic chuck, a wafer-holding assembly that uses electrostatic force.
What to verify before purchase
- Confirm dimensions and mating interfaces.
- Verify Delrin is acceptable for the temperature and chemical exposure.
- Inspect for cracking, swelling, or thread damage.
Confirm with the seller
- Exact application and dimensions are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.