AMAT 0020-32049AMAT 0020-32049AMAT 0020-32049AMAT 0020-32049 CAP, VESPEL,  ESCAMAT 0020-32049 CAP, VESPEL,  ESCAMAT 0020-32049 CAP, VESPEL,  ESCAMAT 0020-32049 CAP, VESPEL,  ESC342-0103// AMAT APPLIED 0020-32049 CAP, VESPEL, ESC [NEW]342-0103// AMAT APPLIED 0020-32049 CAP, VESPEL, ESC NEWAMAT  0020-32049  CAP  VESPEL  ESC - NEW AMAT  0020-32049  CAP  VESPEL  ESC - NEW
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APPLIED MATERIALS 0020-32049

Vespel ESC cap

Market Availability & Pricing

Part number0020-32049
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales99 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › ESC Components
Vespel ESC cap
APPLIED MATERIALS0020-32049Vespel ESC cap
Product description
Vespel cap used with electrostatic chuck hardware.
Specifications and identifiers
component identification
ComponentCap
MaterialVespel indicated
Associated hardwareESC indicated
Applications
process chamber rebuildsESC and pedestal protectionplasma-facing hardwarePVD/CVD chamber maintenanceESC hardware replacementinsulating or wear cap replacementprocess chamber service
How it works

A chamber-facing ceramic, sapphire, or insulating process component.

Chamber parts can affect plasma exposure, particle control, thermal behavior, and fit around wafer or electrode hardware.

Technical guide
ceramic_or_sapphire

Ceramic and sapphire are used where electrical insulation, plasma resistance, optical transmission, or thermal stability are needed.

ESC
Electrostatic chuck, a wafer-holding component used in many plasma process tools.
What to verify before purchase
  • Confirm cap dimensions and installed location.
  • Verify Vespel grade and ESC compatibility.
Confirm with the seller
  • Exact Vespel grade and dimensions are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

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