125-0301 AMAT APPLIED 0020-32166 COVER, PROTECTION, 200MM, ESC [ASIS]AMAT 0020-32166 Cover Protection 200MM ESC, REV A, 113206AMAT 0020-32166 Cover Protection 200MM ESC, REV A, 112938AMAT 0020-32166 Cover Protection 200MM ESC, 112028AMAT 0020-32166 Cover Protection 200MM ESC, 112029AMAT 0020-32166 Cover Protection 200MM ESC, 111032AMAT 0020-32166 Cover Protection 200MM ESC, REV A, 107652AMAT 0020-32166 Electrostatic Chuck Cover, 414810AMAT 0020-32166 Electrostatic Chuck Cover, 414798APPLIED MATERIALS (AMAT) 0020-32166 COVER, PROTECTION, 200MM, ESCAMAT 0020-32166 Cover Protection 200MM ESC, REV A, 110972
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APPLIED MATERIALS 0020-32166

200 mm ESC protection cover

Market Availability & Pricing

Part number0020-32166
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Mechanical › Chamber Components › ESC Components
200 mm ESC protection cover
APPLIED MATERIALS0020-32166electrostatic chuck protection cover
Product description
Protection cover for a 200 mm electrostatic chuck assembly.
Specifications and identifiers
esc component
ComponentProtection cover / electrostatic chuck cover
Nominal wafer size200 mm
RevisionRev A appears in several evidence entries
Applications
process chamber rebuildsESC and pedestal protectionplasma-facing hardwarePVD/CVD chamber maintenanceESC protectionprocess chamber maintenancewafer chuck hardware replacement
How it works

A chamber-facing ceramic, sapphire, or insulating process component.

Chamber parts can affect plasma exposure, particle control, thermal behavior, and fit around wafer or electrode hardware.

Technical guide
ceramic_or_sapphire

Ceramic and sapphire are used where electrical insulation, plasma resistance, optical transmission, or thermal stability are needed.

ESC
Electrostatic chuck, a wafer-holding component used in many plasma process tools.
What to verify before purchase
  • Confirm Rev A if required.
  • Check material, coating, and fit against the installed ESC.
Confirm with the seller
  • Exact material and ESC model are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

125-0301 AMAT APPLIED 0020-32166 COVER, PROTECTION, 200MM, ESC [ASIS]

125-0301 AMAT APPLIED 0020-32166 COVER, PROTECTION, 200MM, ESC [ASIS]

USD 150.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Sep 26, 2024 04:31 UTC
End recorded: Dec 7, 2024 06:41 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 8, 2026 16:21 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-32166 Cover Protection 200MM ESC, REV A, 113206

AMAT 0020-32166 Cover Protection 200MM ESC, REV A, 113206

USD 250.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Jan 10, 2023 18:30 UTC
End recorded: Dec 7, 2024 01:01 UTC
Estimated remaining at check: 4
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:10 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-32166 Cover Protection 200MM ESC, REV A, 112938

AMAT 0020-32166 Cover Protection 200MM ESC, REV A, 112938

USD 250.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jan 4, 2023 22:00 UTC
End recorded: Dec 6, 2024 22:47 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:08 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-32166 Cover Protection 200MM ESC, 112028

AMAT 0020-32166 Cover Protection 200MM ESC, 112028

USD 195.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 1, 2022 20:30 UTC
End recorded: Dec 6, 2024 21:56 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:04 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-32166 Cover Protection 200MM ESC, 112029

AMAT 0020-32166 Cover Protection 200MM ESC, 112029

USD 250.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 1, 2022 20:30 UTC
End recorded: Dec 6, 2024 21:56 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:04 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-32166 Cover Protection 200MM ESC, 111032

AMAT 0020-32166 Cover Protection 200MM ESC, 111032

USD 250.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Nov 2, 2022 17:00 UTC
End recorded: Dec 7, 2024 19:43 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:24 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-32166 Cover Protection 200MM ESC, REV A, 107652

AMAT 0020-32166 Cover Protection 200MM ESC, REV A, 107652

USD 250.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Jun 30, 2022 22:00 UTC
End recorded: Dec 7, 2024 09:20 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:09 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-32166 Electrostatic Chuck Cover, 414810

AMAT 0020-32166 Electrostatic Chuck Cover, 414810

USD 150.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Feb 25, 2016 18:22 UTC
End recorded: Dec 6, 2024 22:51 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 18, 2026 16:09 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-32166 Electrostatic Chuck Cover, 414798

AMAT 0020-32166 Electrostatic Chuck Cover, 414798

USD 150.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Feb 25, 2016 18:20 UTC
End recorded: Dec 6, 2024 22:51 UTC
Estimated remaining at check: 3
Estimated sold at check: 4

eBay response captured — Checked Oct 18, 2026 16:09 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay

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