Product description
Back cover / HV center cover for ESC-related hardware.
Specifications and identifiers
functional details
| Component type | Cover, back, HV center, ESC Repeatedly identified as an ESC-related cover. |
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| Associated assemblies | 0041-37399 / 0041-37693 / 0040-09961 / 0010-10528 referenced These appear as related assembly contexts, not confirmed compatibility for all uses. |
|---|
Equipment context
- Specific tool/platform not confirmed
Applications
process chambersPVD/CVD/etch moduleswafer-area mechanical hardwareSemiconductor equipment maintenanceChamber or subsystem rebuildSpare part replacement
How it works
A chamber mechanical component used as a shield, cover, adapter, baffle, ring, or plate within a semiconductor process module.
These parts protect internal surfaces, define gas/plasma geometry, support wafer-area hardware, or maintain chamber configuration.
Technical guide
- ESC
- Electrostatic chuck; a wafer-holding component using electrostatic force.
What to verify before purchase
- Exact revision and part markings
- Physical condition, cleanliness, and prior process exposure
- Fitment against the target tool BOM or chamber configuration
Confirm with the seller
- Full OEM specification
- Guaranteed compatibility with a specific chamber without BOM confirmation
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.