Product description
Plate, Perf OX, 200 mm, unanodized; used as a shower-head/perforated process plate
Specifications and identifiers
supported identity
| Item type | Perforated OX plate / shower head A perforated plate used for gas distribution or chamber-face hardware. |
|---|
| Wafer/chamber size context | 200 mm The part is associated with 200 mm equipment context. |
|---|
| Finish | Unanodized The evidence supports an unanodized finish; coating should be physically verified. |
|---|
Equipment context
- 200 mm oxide/process chamber
Applications
CVD/oxide process chambersgas distribution hardware200 mm chamber serviceGas distribution in a 200 mm oxide/process chamberReplacement perforated plate or shower-head-related chamber component
How it works
A shower-head or perforated plate distributes process gas through a pattern of holes into a process region.
Hole pattern, flatness, finish, and surface condition can directly affect process uniformity and contamination risk.
Technical guide
aluminum or metal plate
The exact base material is not proven here; 'unanodized' indicates a surface finish state rather than a material.
- Perf OX
- Likely shorthand for a perforated oxide-process plate context; exact OEM expansion is not confirmed.
What to verify before purchase
- Verify hole pattern, flatness, surface finish, and cleaning history
- Confirm whether this is the correct shower-head plate for the chamber revision
Confirm with the seller
- Exact material, coating history, and chamber model are not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.