Amat 0020-35680 Rev-01Amat 0020-35680 Rev-01Amat 0020-35680 Rev-01Amat 0020-35680 Rev-01Amat 0020-35680 Rev-01Amat 0020-35680 Rev-01Amat 0020-35680 Rev-01Amat 0020-35680 Rev-0116942 APPLIED MATERIALS CONE, UPPER LAMP MODULE 0020-356800020-35680 CONE,UPPER LAMP MODULE for AMAT Centura, Used(#20-3)0020-35680 CONE,UPPER LAMP MODULE for AMAT Centura, Used(#20-3)
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APPLIED MATERIALS 0020-35680

upper lamp module cone

Market Availability & Pricing

Part number0020-35680
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales2908.04 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Lamp Module Hardware
upper lamp module cone
APPLIED MATERIALS0020-35680upper lamp module cone
Product description
Cone, upper lamp module, for Applied Materials Centura-style lamp module use.
Specifications and identifiers
part attributes
FunctionUpper lamp module cone
Primary identity is consistent in product notes.
Platform clueCentura
Included in one product note.
Revision clueRev-01
Included in one minimal product note.
Equipment context
  • Applied Materials Centura lamp module
Applications
process chamberspedestal and wafer support areasgas distribution and pumping pathsPVD/CVD chamber kitslamp module hardware replacementRTP or thermal module serviceupper cone hardware
How it works

A chamber or process-module hardware component used around the wafer, pedestal, plasma, gas distribution, or chamber body area.

Geometry, material, coating, wafer size, and process family are critical because these parts affect plasma exposure, thermal behavior, contamination control, and mechanical fit.

Technical guide
Vespel

A high-performance polyimide used for selected high-temperature or low-outgassing hardware.

ceramic

Ceramic parts are common in plasma-facing or high-temperature regions because of electrical insulation and process resistance.

quartz

Quartz is used where optical transmission, thermal behavior, or chemical cleanliness is important.

sapphire

Sapphire windows or lenses are used where optical transmission and hardness are needed.

ESC
Electrostatic chuck, a wafer-holding assembly that uses electrostatic force.
What to verify before purchase
  • Confirm revision and lamp-module configuration.
  • Verify material and surface condition.
  • Check for heat damage or warping.
Confirm with the seller
  • Exact lamp module/platform is not fully confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

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Prices and availability may change. Confirm details with the seller.

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