0020-39087 / PEDESTAL, ESC 195MM, NOTCH, DPS CHAMBER /APPLIED MATERIALS4874 APPLIED MATERIALS ESC CHUCK 235MM SHELL ASSY 0.8" THK 0020-39087Applied Materials 0020-39087 PEDESTAL, ESC  195MM, NOTCH, DPS CHAMBER AMATC3932 APPLIED MATERIALS PEDESTAL ESC 195MM NOTCH DPS CHAMBER 0020-39087Applied Materials (AMAT) 0020-39087 PEDESTAL, ESC 195MM, NOTCH, DPS CHAMBERApplied Materials 0020-39087 Pedistal ESC Notch DPSAMAT 0020-39087, ESC, Chuck, Notch, 195mm, 8", DPS Chamber, 127619AMAT 0020-39087 DPS CHAMBER ESC 200MM CHUCK, 116376AMAT 0020-39087, ESC, Chuck, Notch, 195mm, 8", DPS Chamber, 106683AMAT 0020-39087, ESC, Chuck, Notch, 195mm, 8", DPS Chamber, 106667AMAT PEDESTAL, 195MM SEMI NOTCH, NO FLAT, DPS  0020-39087 19599 APPLIED MATERIALS DPS POLY METAL MP N S-TYPE ESC 0020-39087AMAT 0020-39087 ESC, Chuck, Notch, Pedestal, 195mm, 8", DPS Chamber, 4209440020-39087, AMAT, PEDESTAL, ESC 195MM, NOTCH, DPS CHAMBERAMAT 0020-39087, Pedestal, ESC 195mm, 8" Notch, DPS,  APPLIED MATERIALS0020-39087 / PEDESTAL, ESC 195MM, NOTCH, DPS CHAMBER /APPLIED MATERIALS0020-39087 / PEDESTAL, ESC 195MM, NOTCH, DPS CHAMBER /APPLIED MATERIALS0020-39087 / PEDESTAL, ESC 195MM, NOTCH, DPS CHAMBER /APPLIED MATERIALSApplied Materials 0020-39087 Pedistal ESC Notch DPSAMAT 0020-39087, ESC, Chuck, Notch, 195mm, 8", DPS Chamber, 108447AMAT APPLIED MATERIALS 0020-39087 PEDESTAL 195MM SEMI 8" NOTCHApplied Materials AMAT 0020-39087 Pedestal, 195mm Semi Notch, No Flat, DPS125-0501// AMAT APPLIED 0090-35133 0020-39087 SHELL, ASSY,195MM SEMI NOTCH ASIS7425 APPLIED MATERIALS ELECTROSTATIC CHUCK, ESC 0020-39087AMAT APPLIED MATERIALS 0020-39087 PEDESTAL 195MM SEMI 8" NOTCHApplied Materials AMAT 0020-39087 Rev. 002 195mm Semi Notch No Flat DPS PedestalAMAT Applied Materials 0020-39087 Rev. 002 195mm Semi Notch No Flat DPS PedestalAMAT Applied Materials 0020-39087 Rev. 002 195mm Semi Notch No Flat DPS PedestalApplied Materials AMAT 0020-39087 Rev. 002 195mm Semi Notch No Flat DPS PedestalApplied Materials (AMAT) 0020-39087 PEDESTAL, ESC  195MM, NOTCH, DPS CHAMBER7425 APPLIED MATERIAL ELECTROSTATIC CHUCK, ESC 0020-39087 REV 0024874 APPLIED MATERIAL ESD CHUCK 235MM SHELL ASSY 0.8" THK 0020-39087Applied Materials 0020-39087 Chuck, Chamber DPSNEW AMAT POLYMIDE ESC 8” Electro Static Chuck DPS Metal 200mm 0020-39087NEW AMAT POLYMIDE ESC 8” Electro Static Chuck DPS Metal 200mm 0020-39087NEW AMAT POLYMIDE ESC 8” Electro Static Chuck DPS Metal 200mm 0020-39087NEW AMAT POLYMIDE ESC 8” Electro Static Chuck DPS Metal 200mm 0020-39087Applied Materials 0020-39087 Chuck, Chamber DPSApplied Materials (AMAT) ESC (Electro Static Chuck) P/N: 0020-39087 for 200mmApplied Materials (AMAT) ESC (Electro Static Chuck) P/N: 0020-39087 for 200mmApplied Materials (AMAT) ESC (Electro Static Chuck) P/N: 0020-39087 for 200mmApplied Materials (AMAT) ESC (Electro Static Chuck) P/N: 0020-39087 for 200mmApplied Materials (AMAT) ESC (Electro Static Chuck) P/N: 0020-39087 for 200mmApplied Materials (AMAT) ESC (Electro Static Chuck) P/N: 0020-39087 for 200mmApplied Materials (AMAT) ESC (Electro Static Chuck) P/N: 0020-39087 for 200mmApplied Materials (AMAT) ESC (Electro Static Chuck) P/N: 0020-39087 for 200mmApplied Materials (AMAT) ESC (Electro Static Chuck) P/N: 0020-39087 for 200mmApplied Materials (AMAT) ESC (Electro Static Chuck) P/N: 0020-39087 for 200mmApplied Materials (AMAT) ESC (Electro Static Chuck) P/N: 0020-39087 for 200mmApplied Materials (AMAT) ESC (Electro Static Chuck) P/N: 0020-39087 for 200mmApplied Materials (AMAT) ESC (Electro Static Chuck) P/N: 0020-39087 for 200mmApplied Materials (AMAT) ESC (Electro Static Chuck) P/N: 0020-39087 for 200mmApplied Materials (AMAT) ESC (Electro Static Chuck) P/N: 0020-39087 for 200mmApplied Materials (AMAT) ESC (Electro Static Chuck) P/N: 0020-39087 for 200mmApplied Materials (AMAT) ESC (Electro Static Chuck) P/N: 0020-39087 for 200mmApplied Materials (AMAT) ESC (Electro Static Chuck) P/N: 0020-39087 for 200mmApplied Materials (AMAT) ESC (Electro Static Chuck) P/N: 0020-39087 for 200mmApplied Materials (AMAT) ESC (Electro Static Chuck) P/N: 0020-39087 for 200mmApplied Materials (AMAT) ESC (Electro Static Chuck) P/N: 0020-39087 for 200mmApplied Materials (AMAT) ESC (Electro Static Chuck) P/N: 0020-39087 for 200mmApplied Materials (AMAT) ESC (Electro Static Chuck) P/N: 0020-39087 for 200mmApplied Materials (AMAT) ESC (Electro Static Chuck) P/N: 0020-39087 for 200mm0020-39087 / PEDESTAL, ESC 195MM, NOTCH, DPS CHAMBER /APPLIED MATERIALS
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APPLIED MATERIALS 0020-39087

ESC Pedestal / Electrostatic Chuck

Market Availability & Pricing

PEDESTAL, ESC, 195mm, NOTCH, DPS

Part number0020-39087
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales1325.43 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Wafer Handling & Chucks › Electrostatic Chucks
ESC Pedestal / Electrostatic Chuck
APPLIED MATERIALS0020-39087electrostatic chuck pedestal
Product description
Electrostatic chuck / ESC pedestal, 195 mm notch, 8 inch / 200 mm DPS chamber context.
Specifications and identifiers
chuck details
Chuck typeESC / electrostatic chuck pedestal
A wafer support that uses electrostatic force to hold the wafer.
Wafer size context195 mm / 8 inch / 200 mm appears in evidence
Buyer should confirm exact supported wafer size and notch geometry.
Platform/process contextDPS chamber
Listed evidence repeatedly mentions DPS chamber context.
Equipment context
  • Applied Materials DPS chamber
Applications
Wafer clamping/support in plasma processingEtch chamber pedestal serviceWafer clamping/support in plasma processingEtch chamber pedestal service
How it works

A electrostatic chuck pedestal used as a service/replacement part in semiconductor or industrial equipment.

Correct identification matters because fit, revision, contamination history, and configuration can determine whether the part is usable in a tool.

Technical guide
polyimide_or_ceramic

ESCs may use dielectric layers; evidence mentions polyimide on one title but exact construction should be verified.

DPS
Applied Materials DPS chamber/process context appearing in evidence.
ESC
Electrostatic chuck.
What to verify before purchase
  • Verify exact revision, physical condition, and included accessories before purchase.
  • Confirm compatibility against the tool BOM or OEM part label.
Confirm with the seller
  • Exact OEM compatibility beyond the platforms or contexts appearing in listing evidence is not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

0020-39087 / PEDESTAL, ESC 195MM, NOTCH, DPS CHAMBER /APPLIED MATERIALS

0020-39087 / PEDESTAL, ESC 195MM, NOTCH, DPS CHAMBER /APPLIED MATERIALS

USD 1344.7800

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Oct 6, 2026 14:27 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 7, 2026 16:00 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
4874 APPLIED MATERIALS ESC CHUCK 235MM SHELL ASSY 0.8" THK 0020-39087

4874 APPLIED MATERIALS ESC CHUCK 235MM SHELL ASSY 0.8" THK 0020-39087

USD 1500.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Jun 19, 2026 09:35 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 16, 2026 16:05 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Applied Materials 0020-39087 PEDESTAL, ESC  195MM, NOTCH, DPS CHAMBER AMAT

Applied Materials 0020-39087 PEDESTAL, ESC 195MM, NOTCH, DPS CHAMBER AMAT

USD 500.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: May 19, 2025 06:39 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 12, 2026 16:10 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
C3932 APPLIED MATERIALS PEDESTAL ESC 195MM NOTCH DPS CHAMBER 0020-39087

C3932 APPLIED MATERIALS PEDESTAL ESC 195MM NOTCH DPS CHAMBER 0020-39087

USD 1300.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Oct 28, 2024 07:00 UTC
End recorded: Dec 6, 2024 19:44 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 9, 2026 16:06 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Applied Materials (AMAT) 0020-39087 PEDESTAL, ESC 195MM, NOTCH, DPS CHAMBER

Applied Materials (AMAT) 0020-39087 PEDESTAL, ESC 195MM, NOTCH, DPS CHAMBER

USD 1695.9500

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Sep 24, 2024 11:30 UTC
End recorded: Dec 7, 2024 10:01 UTC
Estimated remaining at check: 6
Estimated sold at check: 2

eBay response captured — Checked Oct 8, 2026 16:17 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

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Applied Materials 0020-39087 Pedistal ESC Notch DPS

Applied Materials 0020-39087 Pedistal ESC Notch DPS

USD 1200.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jun 25, 2024 00:00 UTC
End recorded: Dec 7, 2024 12:57 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 7, 2026 16:04 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-39087, ESC, Chuck, Notch, 195mm, 8", DPS Chamber, 127619

AMAT 0020-39087, ESC, Chuck, Notch, 195mm, 8", DPS Chamber, 127619

USD 1300.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 12, 2023 22:30 UTC
End recorded: Dec 7, 2024 11:09 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 3, 2026 16:04 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-39087 DPS CHAMBER ESC 200MM CHUCK, 116376

AMAT 0020-39087 DPS CHAMBER ESC 200MM CHUCK, 116376

USD 1500.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jun 7, 2023 23:00 UTC
End recorded: Dec 6, 2024 23:36 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:08 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-39087, ESC, Chuck, Notch, 195mm, 8", DPS Chamber, 106683

AMAT 0020-39087, ESC, Chuck, Notch, 195mm, 8", DPS Chamber, 106683

USD 1500.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jun 10, 2022 21:00 UTC
End recorded: Dec 7, 2024 18:28 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:06 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-39087, ESC, Chuck, Notch, 195mm, 8", DPS Chamber, 106667

AMAT 0020-39087, ESC, Chuck, Notch, 195mm, 8", DPS Chamber, 106667

USD 1900.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jun 10, 2022 20:00 UTC
End recorded: Dec 7, 2024 10:17 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:06 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT PEDESTAL, 195MM SEMI NOTCH, NO FLAT, DPS  0020-39087

AMAT PEDESTAL, 195MM SEMI NOTCH, NO FLAT, DPS 0020-39087

USD 1400.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jul 20, 2020 22:33 UTC
End recorded: Dec 7, 2024 11:14 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 20, 2026 16:22 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
19599 APPLIED MATERIALS DPS POLY METAL MP N S-TYPE ESC 0020-39087

19599 APPLIED MATERIALS DPS POLY METAL MP N S-TYPE ESC 0020-39087

USD 759.3500

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Jul 6, 2020 01:30 UTC
End recorded: Dec 7, 2024 10:44 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 20, 2026 16:19 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-39087 ESC, Chuck, Notch, Pedestal, 195mm, 8", DPS Chamber, 420944

AMAT 0020-39087 ESC, Chuck, Notch, Pedestal, 195mm, 8", DPS Chamber, 420944

USD 1100.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jan 25, 2017 17:20 UTC
End recorded: Dec 7, 2024 02:01 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 18, 2026 16:24 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
0020-39087, AMAT, PEDESTAL, ESC 195MM, NOTCH, DPS CHAMBER

0020-39087, AMAT, PEDESTAL, ESC 195MM, NOTCH, DPS CHAMBER

USD 1100.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Mar 1, 2016 18:26 UTC
End recorded: Dec 6, 2024 22:52 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 18, 2026 16:09 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-39087, Pedestal, ESC 195mm, 8" Notch, DPS,  APPLIED MATERIALS

AMAT 0020-39087, Pedestal, ESC 195mm, 8" Notch, DPS, APPLIED MATERIALS

USD 1500.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 19, 2012 23:08 UTC
End recorded: Dec 6, 2024 16:44 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 17, 2026 16:07 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay

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