Product description
Lower bearing race used with upper rotation bearing assembly; often paired with 0020-39360.
Specifications and identifiers
bearing details
| Component | Lower bearing race Specific component wording appears with this part. |
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| Assembly context | Upper rotation / RTP bearing assembly Supported records associate it with upper rotation and RTP. |
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| Related part | 0020-39360 Often paired with an upper/lower bearing set; inclusion is not automatic. |
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Applications
Process chambersWafer-handling assembliesLift mechanismsVacuum and gas-delivery modulesRotation bearing service partRTP module upper-rotation assembly
How it works
A machined mechanical component provides alignment, support, sealing, shielding, or positioning in a semiconductor process module.
Geometry, material, coating, cleanliness, and revision can directly affect fit, vacuum integrity, and process performance.
Technical guide
common
May be aluminum, stainless steel, quartz, ceramic, polymer, or coated metal depending on service location.
What to verify before purchase
- Verify whether only 0020-39361 is included or whether paired bearing part 0020-39360 is included.
- Confirm bearing race orientation and revision.
Confirm with the seller
- Bearing material and dimensional specifications are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.