Product description
6 inch SR pumping plate for WxZ process hardware on Applied Materials equipment.
Specifications and identifiers
plate identification
| Plate type | Pumping plate |
|---|
| Size | 6 inch |
|---|
| Process/tool wording | SR, WxZ |
|---|
Applications
tool rebuildsmechanical mountingprocess chamber servicewafer handling assembliesprocess chamber pumping pathchamber hardware replacement
How it works
A mechanical hardware component used for mounting, support, movement, or chamber structure.
Fit, revision, dimensions, material, and wear condition determine whether the part can be reused safely.
What to verify before purchase
- Confirm 6 inch SR/WxZ configuration and revision.
- Inspect for erosion, coating condition, and flatness if used/refurbished.
Confirm with the seller
- Exact material and platform are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.