Product description
6 inch FC WXZ pumping plate for Applied Materials chamber use.
Specifications and identifiers
chamber hardware
| Item noun | Pumping plate Repeated across sources. |
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| Size | 6 inch Nominal size in repeated descriptions. |
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| Configuration | FC WXZ Configuration/process code repeated; exact expansion not confirmed. |
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Applications
process chamber servicemechanical rebuildsOEM spare replacementchamber pumping-path hardware6 inch WXZ chamber service
How it works
A mechanical chamber component is a fitted metal, ceramic, or polymer part used to support, seal, guide, or protect a process module.
Geometry and surface finish can be critical because small mismatches may affect sealing, wafer clearance, plasma behavior, or mechanical travel.
What to verify before purchase
- Verify FC/WXZ configuration and revision.
- Confirm hole pattern and physical dimensions before installation.
Confirm with the seller
- Exact tool configuration and compatibility are not confirmed beyond the part identity.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.