Product description
Clamp for a drive or 6-port spindle assembly used in LK Reflexion hardware.
Specifications and identifiers
identified features
| Component | Clamp Mechanical clamp used around a spindle drive assembly. |
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| Spindle context | 6-port spindle Specific functional wording appears in the provided part descriptions. |
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| Tool context | LK Reflexion Associated with Reflexion-style CMP hardware. |
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Applications
Chamber hardwareWafer-handling hardwareProcess shields and coversService replacement partsSpindle drive clampingCMP head serviceReflexion subsystem repair
How it works
A mechanical process-tool component used around chambers, wafer handling, shields, covers, brackets, or support assemblies.
Geometry, material, revision, coating, and wear condition can affect fit, sealing, contamination control, and process repeatability.
What to verify before purchase
- Verify clamp geometry and fastener pattern.
- Confirm revision and finish.
- Check fit with the specific 6-port spindle assembly.
Confirm with the seller
- Material and exact drawing revision are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.