Product description
Stainless-steel lower shield clamp ring for Applied Materials chamber hardware.
Specifications and identifiers
chamber hardware
| Item noun | Clamp ring / lower shield clamp ring Repeated identity. |
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| Material | SST Stainless steel abbreviation appears repeatedly. |
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| Revision wording | Rev 003 / lower clamp TWAS Some revision/application wording appears but exact configuration is not fully confirmed. |
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Applications
etch and deposition process chambersESC and cathode surrounding hardwareconsumable chamber hardware replacementlower shield retentionchamber hardware rebuild
How it works
A chamber ring is a shaped process-area component used around wafers, electrodes, shields, or chamber openings.
Rings influence plasma confinement, edge exclusion, process uniformity, and protection of more expensive chamber hardware.
Technical guide
Vespel
High-performance polyimide used in some confinement or insulating ring applications.
quartz
High-purity ceramic material often used where thermal and plasma compatibility are important.
tantalum/titanium
Metals used in PVD-related chamber hardware when process compatibility requires them.
What to verify before purchase
- Verify SST material, revision, and lower-shield fit.
- Confirm whether TWAS/cleaning-related wording applies to the needed unit.
Confirm with the seller
- Exact tool configuration and compatibility are not confirmed beyond the part identity.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.