AMAT APPLIED MATERIALS 0020-61186 COVER PLATE A101 HEATER 300mm PVDAMAT Applied Materials 0020-61186 A101 Heater Cover Plate 300mm PVD Working0020-61186 / COVER PLATE, A101 HEATER 300MM P / APPLIED MATERIALS AMAT0020-61186 / COVER PLATE, A101 HEATER 300MM P / APPLIED MATERIALS AMAT0020-61186 / COVER PLATE, A101 HEATER 300MM P / APPLIED MATERIALS AMATAMAT APPLIED MATERIALS 0020-61186 COVER PLATE A101 HEATER 300mm PVDAMAT APPLIED MATERIALS 0020-61186 COVER PLATE A101 HEATER 300mm PVDNEW AMAT APPLIED MATERIALS 0020-61186 COVER HEATER A101 300mmAPPLIED MATERIALS 0020-61186 COVER PLATE A101 HEATER 300MM PVDAMAT Applied Materials, COVER PLATE, p/n 0020-61186AMAT Applied Materials, COVER PLATE, p/n 0020-61186AMAT Applied Materials 0020-61186 A101 Heater Cover Plate 300mm PVD New
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APPLIED MATERIALS 0020-61186

300 mm A101 Heater Cover Plate

Market Availability & Pricing

Part number0020-61186
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales550 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Shields & Covers
300 mm A101 Heater Cover Plate
APPLIED MATERIALS0020-61186Heater cover plate
Product description
Applied Materials 0020-61186 A101 heater cover plate for 300 mm PVD service.
Specifications and identifiers
identification
DescriptionA101 heater cover plate
Nominal size300 mm
Process contextPVD
Applications
wafer handling assemblieschamber mechanismspedestal and lift hardwaretool mechanical serviceHeater cover plate replacement300 mm PVD chamber hardwareA101 heater area shielding/covering
How it works

A mechanical tool component used for wafer handling, chamber hardware, lift motion, or structural support.

Dimensions, revision, wear surfaces, and mechanical fit determine whether the part can be installed safely without interference.

Technical guide
PVD
Physical vapor deposition
What to verify before purchase
  • Verify part revision and surface condition
  • Confirm 300 mm PVD chamber compatibility
  • Check for warping, scratches, or contamination
Confirm with the seller
  • Exact chamber and material are not confirmed

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

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