Product description
Plate, cam slit valve, AMP-280 context
Specifications and identifiers
identification
| Item type | Cam slit valve plate |
|---|
| Valve context | Slit valve |
|---|
| Referenced context | AMP-280 |
|---|
Applications
vacuum slit valvestransfer chamberswafer transport openingsslit valve servicetransfer chamber hardware repaircam plate replacement
How it works
A slit valve cam plate is a mechanical component associated with a slit valve actuation mechanism.
Wear, alignment, and revision fit can affect valve motion, sealing, and wafer-transfer reliability.
Technical guide
slit_valve
A vacuum gate valve that opens a narrow rectangular passage for wafer transfer.
- cam
- A shaped mechanical surface used to convert motion or control timing/position.
What to verify before purchase
- Verify dimensions, revision, mounting hole pattern, and matching slit valve assembly.
- Inspect wear surfaces and confirm whether AMP-280 is the correct valve/tool context.
Confirm with the seller
- Exact valve model compatibility is not confirmed.
- Material and coating are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.